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Vacuum practitioners use a number of major flange systems including CF, KF, ISO, ASA, JIS, Wire-Seal, and others. All rely on a softer gasket material squeezed between harder flange surfaces to form the vacuum tight seal. |
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A wide variety of feedthroughs with O-ring baseplate ports or flanged mounts are offered for transporting water, cryogens and gas into vacuum system. Gas and water (or other fluids) typically use identical feedthroughs with stainless steel tubes.
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Titanium Sublimation Pumps and Liquid Nitrogen Shields |
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The titanium sublimation pump rarely works as the only ultra high vacuum pump in a system; rather it works as a supplementary pump in a number of very specific applications. For example, where a vacuum system must be rapidly cycled from atmosphere to pressures approaching UHV, a correctly operated Ti sub pump removes active gases in the pressure range from 10-5 to 10-8 mbar. |
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Components for Load Lock such as the Stand for Load Lock Cover or Gripper are designed for ease and convenience of exchange of sample holders in load lock mechanisms. These components are essential for operation of the sample holder and helping to keep it clean.
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Physical vapor deposition sources such as sputter guns or thermal evaporators are often left running while the sample is changed to maintain a stable deposition rate. A shutter is a metal blade that obscures the line of sight between source and substrate to block the deposition plume. Shutters are actuated from air side via a vacuum motion feedthrough.
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Bakeout heaters raise the temperature in and around vacuum systems, allowing them to reach lower pressures than they otherwise would. Higher temperatures provide energy to break the bonds between gas and vapor molecules strongly adsorbed on a chamber's steel surface.
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The term electrical feedthrough when applied to vacuum systems refers to devices that transfer electrical power through the process chamber wall. |
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Every vacuum system used for processing or analyzing samples has a method of introducing the sample into the chamber. Instead a subsidiary chamber called a load lock with its own pumping station attaches to the main chamber by a gate valve shaped and sized to allow the sample and a transporter through.
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Mass Flow Control Systems |
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All vacuum processes using low pressure gases are sensitive to gas number density (the number of molecules per cm3). Attempts to regulate a process by adjusting volumetric flow are ineffective since number density changes with pressure and temperature. |
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The Water Cooling Machines are used to cool many of vacuum system components like: turbo molecular pumps, electron beam evaporators, x-ray sources, furnaces etc. They refrigerate the distilled water while circulating in a closed cycle by means of a cooler.
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Armature
