Vacuum Bakeout Control Units The BCU13 version 1.20 is the equipment for heating zones of the vacuum systems as well as heating samples inside the preparation chambers. Titanium Sublimation Pump Power Supplies The TSP01-PS using a thyristor and a phase-control circuit has been developed to operate a titanium sublimation pump. Sample Heating Power Supply HEAT1-PS The HEAT1-PS is the power supply designed for heating sample on sample holder under clean UHV-conditions using resistance heating method. Sample Heating Power Supply HEAT2-PS Designed for heating sample on sample holder under clean UHV-conditions using resistance or electron bombarding heating method. Load Lock Chambers Sample Park Chambers 4 Axes Manipulator without Motorization 4 Axes Manipulator with R1,Z Axes Motorized Manipulator with R1 Rotation

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