Ion Source Power Supply IS40E-PS

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Description

The Ion Source IS40E-PS is designed to supply Ion Source IS30-40. Unit delivers all required
voltages for operation of the Ion Source, no additional electronics are needed.

Application

The IS40E-PS is designed for Extended Ion Sources IS40E which allows to modification of the ion beam profile and position. The ion source can be used for cleaning the sample or scanning with low beam profile at high or low ion energy.

Additional information

The IS40E-PS is mounted in the 19” rack (full-width, 3 units height).

Specification

Beam energy	1eV ÷ 5000eV at max 1mA; Error < 1V; Ripple < 0,2Vpp
Electron ionization current	10µA – 10mA, resolution 10µA, Error < 2%
Degas	Degas controlled with internal timer
Filament current	3A ÷ 5,5A at max 12V
Focus	High Voltage Power Supplies for 2 focusing electrode 1V ÷ 5000V at max 1mA,Error < 1V; Ripple <0,2Vpp
Deflection	± 650V for X and Y deflection plates
Scanning	Scanning area: 0 ÷ 100% of max deflection TPD (time per dot): 20µs ÷ 10ms
User Interface	LCD graphic display 128 x 240 dots, functions keys and 4 digital encoders for editing simultaneously and precisely all required parameters Several settings of process parameters can be stored and recalled
Communication	2 wire RS-485 for control all parameters by external computer
Dimensions	483 x 133 x 500 mm (W x H x D)

This website is not an offer within the meaning of the Civil Code, and has information character only. Contact with our specialist before you order, please.