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Ion Source Power Supply IS40C-PS

Description

The IS40C-PS power supply is designed to operate on IS40C ion source. Unit delivers all required voltages for the Ion Source , so that no additional electronics are needed.

Application

The IS40C-PS Power Supply is designed to operate on IS40C Ion Sources used for cleaning of sample surfaces in UHV. Ion beam profiling and positioning are not available in this version of Power Supply.

The unit has a simple operating menu with digital encoder for precise control of ion energy, extractor voltage, emission current and other parameters. All parameters can be stored and recalled.

Additional information

The IS40C-PS is mounted in the 19” rack (full-width, 3 units height).

 

 

Specification
Beam energy 120eV ÷ 5000eV at max 1mA; Error < 1V; Ripple < 0,2Vpp
Electron ionization current 10µA – 10mA, resolution 10µA, Error < 2%
Degas Degas controlled with internal timer
Filament current 3A ÷ 5,5A at max 12V
Focus Not available
Deflection Not available
Scanning Not available
User Interface LCD graphics display 128 x 240 with functions keys.
Suitable digital encoder for editing precisely all parameter
A set of process parameters can be stored and recalled
Communication 2 wire RS-485 for control all parameters by external computer
Dimensions 483 x 133 x 430 mm (W x H x D)


 
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