Description
The 5 Axes Manipulator with X, Y, Z, R1, R2 Axes Motorized is a high precision, high rigidity, UHV specimen manipulator of modular construction, suitable for a range of X, Y, Z, R1 and R2 motions. The modular construction means that the specification can be upgraded or modified by the addition or replacement of well defined modules. All axes of the manipulator are motorized by stepper motors. Motorized X, Y and Z axes can still be operated manually by micrometers or handwheel. The standard mounting flange is DN 100CF or DN 160CF and the standard travelling flange is DN 40CF (optionally DN 63CF). The 5 Axes Manipulator is a connection of XY Stage, Z Slide and Vacuum Part of Manipulator (see chapters XY Stages and Z Slides).
Application
The 5 Axes Manipulators are used for manipulating of sample holders and scientific tools with respect to a sample's position. These manipulators, when combined with sample holders mounted on rotary drives, allow precise placement and manipulation of samples in UHV environments. The manipulator itself moves the sample on three orthogonal axes, X,Y, and Z while a rotary drives provides rotation R1 and R2 around Z andYaxes. They can work in any orientation.
Additional information
The 5 Axes Manipulators have the Sample Receiving Stations on the Vacuum Parts of Manipulator for holding sample holders. The station is equipped with electrical contacts (2 pcs thermocouple type K, C or E, 2 pcs sample potential up to 1000V, 2 pcs heating current up to 20A) and cooling contact (Cool Finger) for liquid nitrogen cooling. The manipulator has all necessary electrical, gas, mechanical feedthroughs, tubes, cables and electronic devices for motorized X,Y, Z, R1 and R2 axes. The Stepper Motor Shift for Z Slide is controlled by an electronic device SMCD20 (see chapters Stepper Motor Control SMCD20). The Stepper Motor Shifts for XY Stage and R1, R2 axes are controlled by electronic deviceSMCD10 (see chapters Stepper Motor Driver SMCD10).
Motorized axes of manipulator are controled with PREVAC manipulator control software.
| Specification |
|
| Positional control X, Y | Micrometer
or stepping motor |
| Positional control Z |
Handwheel
or stepping motor |
| Positional control R1 | Stepping motor |
| Positional control R2 |
Stepping motor |
| Pressure range: | 1 bar to 10-11 mbar |
| Operating temperature |
-25°C to +60°C |
| Standard base flange | DN 100CF
or DN 160CF |
| Travelling flange |
DN 40CF
or DN 63CF |
| XY Motion | ± 12.5 mm |
| Resolution X, Y (manual) |
5 μm |
| Resolution X,Y (motorized) | 0.5 μm |
| Repeatability X, Y (manual) |
5 μm |
| Repeatability X, Y (motorized) | 1 μm |
| Maximum speed |
2 mm/s |
| Z Motion | 75 ÷ 800 mm |
| Resolution Z (manual) |
0.05 μm |
| Resolution Z (motorized) | 5 μm |
| Repeatability Z (manual) |
0.05 mm |
| Repeatability Z (motorized) | 1 μm |
| Maximum Z speed |
2 mm/s |
| R1 Range | ± 180 deg |
| Resolution R1 (motorized) |
0.1 deg |
| Repeatability R1 (motorized) | 0.05 deg |
| Maximum R1 speed |
4 deg/s |
| R2 Range | ± 360° continuous |
| Resolution R2 (motorized) |
0.1 deg |
| Repeatability R2 (motorized) | 0.05 deg |
| Maximum R2 speed |
4 deg/s |
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Manipulators 
