4 Axes Manipulator without Motorization

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Description

The 4 Axes Manipulator is a high precision, high rigidity, UHV specimen manipulator of modular construction, suitable for a range of X, Y, Z and R1 motions. The modular construction means that the specification can be upgraded or modified by the addition or replacement of well defined modules. All axes of the manipulator are operated manually by using a handwheel, micrometers or rotary feedthrough. The standard mounting flange is DN 100CF or DN 160CF and the standard travelling flange is DN 40CF (optionally DN 63CF). The 4 Axes Manipulator is a connection of XY Stage, Z Slide and Vacuum Part of Manipulator(see chapters XY Stages and Z Slides).

Application

The 4 Axes Manipulators are used for manipulating of sample holders and scientific tools with respect to a sample's position. These manipulators, when combined with sample holders mounted on rotary drives, allow precise placement and manipulation of samples in UHV environments. The manipulators themselves move the sample on three orthogonal axes, X, Y, and Z while a rotary drive provides rotation R1 around Z axis. They can work in any orientation.

Additional information

The 4 Axes Manipulators have the Sample Receiving Stations on the Vacuum Parts of Manipulator for holding sample holders. The station is equipped with electrical contacts (2 pcs thermocouple type K, C or E, 2 pcs sample potential up to 1000V, 2 pcs heating current up to 20A) and cooling contact with sapphire ball (Cool Finger) for liquid nitrogen cooling. The manipulator has all necessary electrical, gas and mechanical feedthroughs. Can be motorized according to motorization of XY Stages, Z Slides and Rotation Modules (see chapters Stepper Motor Shifts for XY Stages, Stepper Motor Shifts for Z Slides and Motorized Rotation Modules).

Specification

Positional control X, Y	Micrometer
Positional control Z	Handwheel
Positional control R1	Rotary feedthrough
Pressure range	1 bar to 10^-11 mbar
Operating temperature	-25°C to +60°C
Operating temperature	150°C
Standard base flange	DN 100CF or DN 160CF
Travelling flange	DN 40CF or DN 63CF
XY Motion	± 12.5 mm
Resolution X, Y (manual)	5 μm
Repeatability (manual)	5 μm
Z Motion	75 ÷ 800 mm
Resolution Z (manual)	0.05 mm
Repeatability Z (manual)	0.05 mm
R1 Range	± 180° deg
Resolution R1 (manual)	0.5 deg
Repeatability R1 (manual)	0.5 deg

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