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4 Axes Manipulator with R1,Z Axes Motorized |
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Quotation Inquiry |
Description
The 4 Axes Manipulator with Z, R1 Axes Motorization is a high precision, high rigidity, UHV specimen manipulator of modular construction, suitable for a range of X, Y, Z and R1 motions. The modular construction means that the specification can be upgraded or modified by the addition or replacement of well defined modules. X and Y axes of the manipulator are operated manually by micrometers. Z and R1 axes are motorized by stepper motors. Motorized Z axis can still be operated manually by handwheel. The standard mounting flange is DN 100CF or DN 160CF and the standard travelling flange is DN 40CF (optionally DN 63CF). The 4 Axes Manipulator is a connection of XY Stage, Z Slide and Vacuum Part of Manipulator(see chapter XY Stages Z Slides).
Application
The 4 Axes Manipulators are used for manipulating of sample holders and scientific tools with respect to a sample's position. These manipulators, when combined with sample holders mounted on and rotary drives, allow precise placement and manipulation of samples in UHV environments. The manipulator itself moves the sample on three orthogonal axes, X, Y, and Z while a rotary drive provides rotation R1 around Z axis. Can work in any orientation.
Additional information
The 4 Axes Manipulators have the Sample Receiving Stations on the Vacuum Parts of Manipulator for holding sample holders. The station is equipped with electrical contacts (2 pcs thermocouple type K, C or E, 2 pcs sample potential up to1000V, 2 pcs heating current up to 20A) and cooling contact (Cool Finger) for liquid nitrogen cooling. The manipulator has all the necessary electrical, gas, mechanical feedthroughs, tubes, cables and electronic devices for motorized Z and R1 axes. X, Y axes can be also motorized according to motorization of XY Stages (see chapters Stepper Motor Shifts for XY Stages). The Stepper Motor Shift for Z axis is controlled by an electronic device SMCD20(see chapters Stepper Motor Control Driver SMCD20). The Stepper Motor Shifts for R1 axis is controlled by electronic deviceSMCD10 (see chapter Stepper Motor Control Driver SMCD10).
Motorized axes of manipulator are controled with PREVAC manipulator control software.
| Specification |
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| Positional control X, Y | Micrometer | Resolution X, Y (manual) | 5 μm |
| Positional control Z |
Handwheel
or stepping motor |
Repeatability X, Y (manual) |
5 μm |
| Z Motion |
75 ÷ 800 mm |
| Positional control R1 | Stepping motor | Resolution Z (manual) | 0.05 mm |
| Pressure range |
1 bar to 10" mbar |
Resolution Z (motorized) |
1 μm |
| Operating temperature | -25°C to +60°C | Repeatability Z (manual) | 0.05 mm |
| Bakeout temperature |
150°C |
Repeatability Z (motorized) |
1 μm |
| Standard base flange | DN 100CF
or DN 160CF | Maximum Z speed | 2 mm/s |
| R1 Range | ± 180 deg |
| Traveling flange |
DN 40CF
or DN 63CF |
Resolution R1 (motorized) |
0.1 deg |
| Repeatability R1 (motorized) |
0.05 deg |
| XY Motion | ± 12.5 mm | Maximum R1 speed | 4 deg/s |
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