Description
The XYZ Manipulator is a precision, high rigidity UHV specimen translator having X, Y and Z motions. The standard mounting flange is DN 63CF or DN 40CF and the standard travelling flange is DN 40CF or DN 63CF. It is a connection of XY Stage and Z Slide (see chapters XY Stages and Z Slides). The translators can work in any orientation.
Application
The XYZ Manipulator has been designed for ease and convenience of use. X and Y movement is +/- 12.5 mm, depending on the accessories that are fitted. Z movement is 75÷250 mm, depending on the application. Additional information Only Z movement can be motorized (see chapter Stepper Motor Shifts for Z Slides).
| Specification |
|
| Positional control X, Y | Micrometer |
| Positional control Z |
Handwheel |
| Bakeout temperature | 150°C |
| Mounting flange |
DN 63CF or DN 100CF |
| Travelling flange | DN 40CF |
| XY motion |
±12.5 mm |
| Resolution X, Y | 5 μm |
| Repeatability X, Y |
5 μm |
| Z motion | 75÷200 mm |
| Resolution Z (manual) |
0.05 mm |
| Repeatability Z (manual) | 0.05 mm |
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