XY Stage

XY Stage

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Description

The XY Stage is a precision, high rigidity UHV specimen translator having X and Y motions. The standard mounting flange is DN 160CF. A DN 100CF mounting flange version is also available. The translator can work in any orientation.

Application

The XY Stages has been designed for ease and convenience of use. X and Y movement is +/- 12.5 mm, depending on the accessories that are fitted. They can also be used to reposition a chamber port with an axis that is parallel to, but slightly off, the desired direction. In this last usage it is sometimes referred to as an XY adjuster and is a very economical alternative to other devices.

Additional information

The XY Stages are mostly used together with Z Slides (see chapter Z Slides). After connection XY Stage with Z Slide we get XYZ Manipulator (see chapter XYZ Manipulators) with three degrees of freedom. The XY Stage can be fitted with stepper motors (see chapter Stepper Motor Shifts for XY Stages).

Specification

Mounting flange	DN 100CF or DN 160CF
Travelling flange	DN 63CF od DN 100CF
Bellow ID	92 mm (max 127mm)
Bakeout temperature	150°C
Positional control X,Y	Micrometer
X, Y motion	±12.5 mm
Resolution X, Y	5 μm
Repeatability X, Y	5 μm

This website is not an offer within the meaning of the Civil Code, and has information character only. Contact with our specialist before you order, please.