Vacuum Baking

Vacuum Baking

Quotation Inquiry

Periodic baking of the vacuum components is performed to maximize the quality of the chamber vacuum. Baking of the chamber attachments is required to prevent the formation of cold spots to which particles and elements would migrate and become plated out.
Baking requires that all materials used inside the vacuum chamber, and not recessed in ports, are able to withstand baking temperatures up to 450°C. This requirement does not apply if it can be demonstrated that the maximum temperature to which these materials are exposed during baking is less than 450°C. All hardware attached to or located directly inside the first flange of the vacuum chamber shall be capable of being baked to 250°C. Any hardware attached directly to the vessel, out to the first isolation valve (if used), shall also be equipped with provisions for baking. These provisions include thermal insulation and possibly heating elements to ensure that temperatures in the range 200 ÷ 250°C (150 ÷ 200°C at Viton seals) can be achieved during bakeout. Further, all devices and metallic tubing attached to, and capable of being opened to the chamber, shall be reviewed to determine the need for individual baking.

We have the scope for vacuum baking components up to 600°C. We produce ovens for vacuum baking. For more information refer chapter UHV and HV Systems - High Vacuum Furnace.

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