In vacuum systems chambers contain the vacuum at base pressures ranging over 10 orders of magnitude. The chambers physical characteristics are as varied as applications for which vacuum is used. They can be as small as a few millimeters in diameter or as large as a few meters in diameter.

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The sample holders are one of the most critical part of the surface measurement in UHV systems. The more dedicated the sample holder is, the better the measurement results. The results of the whole experiment can sometimes depend on the idea, design, materials and precision of the holders.

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The emission sources are Ion Sources, Electron Sources, Flood Sources, Electron Beam Evaporators, Effusion Cells, X-Ray Sources.

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