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Vacuum Components
Emission Sources
Emission Sources
Emission Sources
ION Source IS 40C1
The IS 40C1 is a compact, easy-to-handle extractor type ion source used mostly for sample cleaning. It is mounted on a DN 40CF flange.
ION SOURCE IS 40E1
The IS 40E1 is a compact, easy-to-handle extractor type ion source used mostly for sample cleaning. It is mounted on a DN 40CF flange.
ELECTRON SOURCE ES 40C1
The Electron Source ES 40C1 is a scanable electron source with small spot profile
FLOOD SOURCE FG 40A1
The FG 40A1 is a compact, easy to handle, reliable flood source for charge neutralization of positively charged insulators or semiconductors.
X-RAY SOURCE RS 40B1
The RS 40B1 is a new, high intensity twin anode X-ray source optimized for XPS experiments.
EFFUSION CELL EF 40C1
The Effusion Cell EF 40C1 is a UHV component, designed for indirect resistive heating and used for getting highly constant evaporation rates.
ELECTRON BEAM EVAPORATOR EBV 40A1
The EBV 40A1 is designed for thin film growth and molecular beam epitaxy.
UV Source UVS40A2
The high intensity UV Source can be operated with various discharge gases, such as helium, neon, krypton, argon xenon or hydrogen.
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