Description

The IS 40E1 is an extractor type ion source, mounted on a rotatable flange DN 40CF. Its flange-to-sample distance can be 180 ÷ 200 mm and a standard working distance from end of source to the sample is 23 mm. The two lens system of the source allows easy changing of the spot size, which is continuously variable. It can be operated over a primary energy range of 0.15keV to 5 keV. Because of its very slim outline and a housing cone angle of 50° it is ideally suitable for tight environments. The filament is non-line-of-sight to the sample, thereby minimizing contamination from the source. It is field replaceable with non-critical alignment and long lifetime which makes the source serviceable by the user and hence economical. Due to this special cathode type (Y O coated Ir filament) the operation temperature of the ionizer is considerably lower than for other sources, hence reducing ion beam contamination. Additionally the cathode allows for operation with reactive gases like O , H and hydrocarbons, but unfortunately with shorter cathode life time. The scanning area is 10x10 mm at the standard working distance of 23 mm. Over this area the sputter crater is extremely homogeneous. This results in precise depth profiles with maximum depth resolution. There are two ports for differential pumping. Usually the first differential pumping stage is linked with the pumping line of the second differential stage via a valve acting as a throttle. The second differential stage is connected to a UHV pumping system. The source can be supplied complete with an (UHV) gas inlet with leak valve and a differential pumping system. As an option a Wien Mass Filter for elimination of unwanted isotopes, impurities, multiple charged ions, neutral particles can be retrofitted to the source.

Additional information

• Two stages differential pumping
• Suitable for reactive gases like O , H and hydrocarbons
• UHV conditions in chamber during using of the ion gun
• Wien Mass Filter
• Gas inlet system
• Differential pumping system
• Remote operation for depth profiling
• Two lens system for easy adjustment of spot size
• Ion Source Power Supply IS40E-PS
• Linear Shift (optional)
  
  
  
  Specification
  Large working distance	23 ÷ 100 mm
  Small cone angle	50°
  Rotatable cone angle	DN 40CF
  Insertion depth	standard 163 mm
  High current density	80 μA/cm
  Variable primary energy	0.15 keV ÷ 5 keV
  Large scan area	10x10 mm

Note:
Dimensions and ranges shown in specifications and drawings may be changed for an individual customer needs.