4-5 axes Universal Manipulators
|Standard base flange||DN 100CF or DN 160CF|
|Pressure range||down to 10-11 mbar|
|Heating methods||resistive, EB, direct|
|XY range||± 12.5 mm|
|resolution (manual/motorised)||5 μm / 1 μm|
|Z range||75 - 800 mm (other on request)
|resolution (manual/motorised)||500 μm / standard 10 μm
(1 μm on request)
|R1 range||± 175°
|positional control||rotary feedthrough/motorised*|
|R2 range||360° continuous / ±90°
|Bakeout temperature||up to 150 °C|
* stepper motor or servomotor - depend on application.
Manipulator can be prepared for customer motors or drivers - on request.
The 4-5* axes manipulator with X, Y, Z, R1, R2 axes motorised is a high precision, high rigidity, UHV specimen manipulator of modular construction.
The modular construction means that the specification can be upgraded or modified by the addition or replacement of well defined modules. All axes of the manipulator are motorised by stepper motors or servomotors. The X, Y and Z axes may also be operated manually by as required. The standard mounting flange is DN 100CF or DN 160CF. The 4-5 axes manipulator is a combination of XY stage, Z slide and rotation stages.
▪ Full motorisation
▪ Full software control
▪ Temperature stabilisation
▪ Heating option: direct, resistive or EB
▪ Heaters suitable for reactive gases (resistive heating)
The multi-axes manipulators are configured with a sample receiving station that can accept one of the PTS range of sample holders. The station is equipped with 6 electrical contacts (2 x thermocouple type K, C or E; 2 x sample bias up to 1000V, 2 x heating current up to 20A) and sapphire ball cooling contact for liquid nitrogen cooling. The manipulator includes all of the necessary electrical, gas and mechanical feedthroughs together with stepper motor and stepper motor driver for the XY, Z, R1 and R2 axes.
* 6 axes manipulator for PTS sample holders on request.