Deposition manipulators

1-4 axes Sputtering Manipulators

1-4 axes Sputtering Manipulators1/2

Technical data

Standard base flange DN 100CF, DN 160CF or DN 200CF
Base pressure range 10-9 mbar
Shutter integrated or external, pneumatic or manual
Heating methods resistive, EB, direct
Substrate temperature up to 1000 °C
Cooling method H20
Z range 50 mm (other on request)
   positional control handwheel/motorised*
   resolution (manual/motorised) 500 μm / standard 10 μm (1 μm on request)
R1 range 360° continuous
   positional control motorised*
XY range (option)
± 12.5 mm
   positional control micrometer/motorised*
   resolution (manual/motorised) 5 μm / 1 μm
Max speed up to 60 rpm (other on request)
Bakeout temperature up to 150 °C

* stepper motor or servomotor - depend on application.
Manipulator can be prepared for customer motors or drivers - on request.


Modular, motorised manipulator suitable for a range of R1 continuous substrate rotation and Z translation (additionaly can be equipped with XY movement module).

It is prepared to heat the substrate up to 1000°C with accuracy +/- 1°C. The station includes the substrate (standard up to 6 inch sample holder) positioner and allows precise angular position of substrate in relation to linear shutter.


The 1-4 axes motorised sputtering manipulator is designed for sputter deposition applications under ultra-high vacuum conditions, and for reactive sputtering. Heating is performed by resistive method. The manipulator can work in the vertical orientation.

Manipulator for MBE applications:

▪ sample holders: plate style, PTS
▪ base pressure: 10-9 mbar (working pressure: ~10-2 mbar)

Heater materials

The heater material is optimally adapted depending on the customer's requirements and the specific conditions of the deposition process (e.g. heating temperature, presence of reactive gases). Exemplary heaters: thermocoax, graphite coated with SiC, SiC solid (β).


▪ H2O cooling
▪ side or integrated wedge shutter
▪ XY movement stage



this site uses cookie files.

We use information saved in cookie files, among others, in statistical purposes and in order to fit the service to individual needs of the user. In your browser you can change your cookie files settings.

Using the site without changing cookie files settings means they will be saved in device memory. More information with tips how to change settings can be found in Privacy policy.


Query list