Analytical systems

Multichamber UHV system [project 288]

Multichamber UHV system.

Transferring system

PTS sample holder.

System configuration

- Two-level Preparation chamber:

  • High precision 5-axis manipulator with LN2 cooling and possibility of heating up to 2000°C
  • LEED/Auger
  • Electron Beam Evaporator
  • Deposition rate measurement system: Quartz Balance and Thickness monitor
  • Electron Beam Evaporator
  • Gas dosing system

- Radial Distribution Chamber for transferring the samples between attached chambers under UHV conditions

- Analysis chamber:

  • High precision 5-axis manipulator with LN2 cooling and possibility of heating up to 1200°C
  • Electron analyzer XPS/UPS
  • Dual anode X-ray source for XPS measurement
  • UV source with dedicated pumping system for UPS measurement
  • Electron source
  • Ion source with dedicated pumping system for depth profiling

- Load Lock chamber

- STM Chamber

- Accessories:

  • Set of sample holders
  • Bakeout system
  • 19" rack cabinets for all electronic units
  • Support frame
  • LED lighting

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» Components

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» Electronics

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