Multichamber UHV system [project 449]
Multichamber UHV system.
Transferring system
PTS sample holder.
System configuration:
- Analysis chamber:
- High precision 4-axis manipulator with LN2 cooling and possibility of heating up to 1200°C
- Electron Energy Analyzer XPS/UPS/ISS Spectromicroscopy
- Monochromatized X-ray source for XPS measurement
- Flood source
- Ion source with dedicated pumping system for depth profiling with Wien mass filter
- Two-level Preparation chamber:
- High precision 4-axis manipulator with LN2 cooling and possibility of heating up to 2000°C
- LEED/Auger
- Electron Beam Evaporator (retractable)
- Deposition rate measurement system: Quartz Balance and Thickness monitor
- Load Lock chamber
- Radial Distribution Chamber for transferring the samples between attached chambers under UHV conditions
- Storage Chamber including park mechanism for 10 sample holders/masks
- Accessories:
- Set of sample holders
- Bakeout system
- 19" rack cabinets for all electronic units
- Support frame
- LED lighting