Analytical systems

Multichamber UHV system [project 449]

Multichamber UHV system.

Transferring system

PTS sample holder.

System configuration:

- Analysis chamber:

  • High precision 4-axis manipulator with LN2 cooling and possibility of heating up to 1200°C
  • Electron Energy Analyzer XPS/UPS/ISS Spectromicroscopy
  • Monochromatized X-ray source for XPS measurement
  • Flood source
  • Ion source with dedicated pumping system for depth profiling with Wien mass filter

- Two-level Preparation chamber:

  • High precision 4-axis manipulator with LN2 cooling and possibility of heating up to 2000°C
  • LEED/Auger
  • Electron Beam Evaporator (retractable)
  • Deposition rate measurement system: Quartz Balance and Thickness monitor

- Load Lock chamber

- Radial Distribution Chamber for transferring the samples between attached chambers under UHV conditions

- Storage Chamber including park mechanism for 10 sample holders/masks

- Accessories:

  • Set of sample holders
  • Bakeout system
  • 19" rack cabinets for all electronic units
  • Support frame
  • LED lighting

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» Components

1-3 axes Manipulators

» 1-3 axes Manipulators

Wide range of customised UHV manipulators with up to three othogonal axes XYZ.

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Analytical Chamber

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Designed for applications requiring the investigation of the chemical and physical properties of solid state surfaces, thin films and nanomaterials.

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Deposition holders

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Sample holders (substrate holders, plates, wafers, molyblocs) dedicated for different deposition techniques, such as MBE, magnetron sputtering, thermal evaporation and others.

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Transferring Tunnel

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Transferring tunnel is used to transfer samples between UHV chambers, in a stable and easy-to-operate way.

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» Electronics

X-ray Cooling Controller XRCB-02

» X-ray Cooling Controller XRCB-02

The XRCB-02 Cooling Controller is mainly used to cooling control of the X-ray sources.

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Research Unit Digital Instrument RUDI-EA2

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Novel, modular high voltage power supply for photoemission and other demanding research applications.

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Ion Source Power Supply IS40-PS

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High stability & low noise power supply, which can be configured to work with IS40C1 or IS40E1 Ion Sources.

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Wien Filter Power Supply IS40-WPS

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Power Supply for Wien Mass Filter (Ion Source IS 40E1).

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» Software

Synthesium

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New software dedicated to vacuum deposition applications.

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Control and data acquisition software dedicated to EA15 class analysers.

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Application for Thermal Desorption Spectroscopy

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Used to control the power, preparing a recipe for heating and acquisition of measured data.

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