Analytical systems

Multichamber UHV system [project 449]

Multichamber UHV system.

Transferring system

PTS sample holder.

System configuration:

- Analysis chamber:

  • High precision 4-axis manipulator with LN2 cooling and possibility of heating up to 1200°C
  • Electron Energy Analyzer XPS/UPS/ISS Spectromicroscopy
  • Monochromatized X-ray source for XPS measurement
  • Flood source
  • Ion source with dedicated pumping system for depth profiling with Wien mass filter

- Two-level Preparation chamber:

  • High precision 4-axis manipulator with LN2 cooling and possibility of heating up to 2000°C
  • LEED/Auger
  • Electron Beam Evaporator (retractable)
  • Deposition rate measurement system: Quartz Balance and Thickness monitor

- Load Lock chamber

- Radial Distribution Chamber for transferring the samples between attached chambers under UHV conditions

- Storage Chamber including park mechanism for 10 sample holders/masks

- Accessories:

  • Set of sample holders
  • Bakeout system
  • 19" rack cabinets for all electronic units
  • Support frame
  • LED lighting

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» Components

Transferring Tunnel

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Transferring tunnel is used to transfer samples between UHV chambers, in a stable and easy-to-operate way.

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Slit Unit Manipulators

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Single axis manipulators for adjusting the shape of cross-sectional area of the beam.

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The PTS STANDARD sample holder for easy sample mounting and optional BIAS current measurement.

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» Electronics

Ion Source Power Supply IS40-PS

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Control the low power stepper motors in applications where high speed and high torque is not very important.

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» Software

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