Analytical systems

Multichamber UHV system [project 449]

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Multichamber UHV system.

Transferring system

PTS sample holder.

System configuration:

- Analysis chamber:

High precision 4-axis manipulator with LN2 cooling and possibility of heating up to 1200°C
Electron Energy Analyzer XPS/UPS/ISS Spectromicroscopy
Monochromatized X-ray source for XPS measurement
Flood source
Ion source with dedicated pumping system for depth profiling with Wien mass filter

- Two-level Preparation chamber:

High precision 4-axis manipulator with LN2 cooling and possibility of heating up to 2000°C
LEED/Auger
Electron Beam Evaporator (retractable)
Deposition rate measurement system: Quartz Balance and Thickness monitor

- Load Lock chamber

- Radial Distribution Chamber for transferring the samples between attached chambers under UHV conditions

- Storage Chamber including park mechanism for 10 sample holders/masks

- Accessories:

Set of sample holders
Bakeout system
19" rack cabinets for all electronic units
Support frame
LED lighting

Related products

» Systems

» XPS system [project 212]

Analytical chamber designed for X-ray photoelectron spectroscopy (XPS), integrated with multichamber vacuum system for thin
film deposition.

Multi-chamber system for designed for possibility of deposition of layers of metallic, semiconducting and dielectric PLD method and deposit layers and layer structures composed of several different materials in the configuration of DIBS

» Deposition system with fully automated process control [project 458]

Deposition HV system dedicated for: DC magnetron sputtering, RF magnetron sputtering, reactive sputtering and evaporation using electron beam.

» Analytical UHV system integrated with MBE chamber [project 473]

A analytical UHV system dedicated for investigation of the chemical and physical properties of solid state surfaces in UHV conditions integrated with MBE chamber.

» Components

» X-ray Source with Monochromator RMC50

Based on ellipsoidal quartz crystal and operates according to Bragg Law of X-ray diffraction.

» XY Stages

Precision, high rigidity UHV specimen translator having X and Y motions.

» Preparation Chamber

For standard sample preparation techniques, thin film growth, sputtering, annealing and advanced preparation techniques with in-situ characterisation.