Analytical systems

Analytical UHV system integrated with MBE chamber [project 473]

Description

A analytical UHV system dedicated for investigation of the chemical and physical properties of solid state surfaces in UHV conditions integrated with MBE chamber.

Specification

- Analysis chamber with base pressure range 5*10-11 mbar, made from mu-metal which guaranteed residual magnetic field lower than 0,5 microTesla.
- Load Lock chamber allows loading up to three 2’’ PTS sample holder
- Special design MBE chamber equipped with:

  • High precision 2-axis manipulator with stage for 2’’ holders with heating module for 3’’ heater and water shield around (heating up to 1000°C – oxygen compatible)
  • Ports for 10 sources
  • 10 x electro-pneumatic shutters dedicated for sources
  • Deposition rate measurement system: Quartz Balance and Thickness monitor
  • Beam Flux Monitor
  • Additional free ports for other components in future
  • The deposition process is fully programmable via dedicated PC software and PLC controller.

- Radial distribution chamber (UFO) for transferring the samples are transferred between chambers under UHV pressures
- Accessories:

  • Set of dedicated sample holders
  • Special rack for all electronics unit
  • Special design bakeout system

Transferring system for 2’’ PTS Sample holder.

 

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