Analytical systems

Multichamber ESCA UHV system [project 053]

Description

Customized multi chamber UHV system dedicated for investigation of the chemical and physical properties of solid state surfaces in wide temperature and pressure ranges.

Specification

Multi-chamber system designed for investigations and modifications of solid surfaces by different methods under very well controlled conditions. Central radial distribution chamber with attached analytical chambers and auxiliary chambers fulfill these demands and ensure high quality measurement because the samples are transferred between chambers under UHV pressures (<10-10mbar). The base pressure in the analytical chambers is < 5*10-11 mbar.

  • Multifunctional analytical chamber integrates different measurement methods like standard ESCA, ESCA with lateral resolution < 9μ, AES, ISS and UPS. A high precision, 5 axes manipulator ensures very good positioning of the sample and it is equipped with cryostat for LN2 and a heater for cooling and heating of the sample in a very wide temperature range. The temperature range depends on the sample holders and can vary from -180°C to 2000°C. The chamber is made from mu metal, equipped with hemispherical analyzer and analytical equipment as ion source, electron source, flood gun, X-ray source and prepared for many others. The equipment can be modified according to the customer demands.
  • Variable temperature STM/AFM chamber is mounted on a concrete plate located on a separate frame with a vibration isolation system. The distribution chamber transfer system allows the samples holders to be placed directly in to the STM/AFM receiving station in the same way as manipulators located in others chambers. The chamber is equipped with an electron beam evaporator which can work during the measurements. The chamber has own magazine part for tips and samples, with tip heating station and suitable wobble stick for transportation between the magazine and the STM receiving station.
  • Three levels preparation chamber, equipped with LEED, TDS, ion source, electron beam evaporator, mechanical surface cleaner, and many ports which can be used for future preparation or evaporation devices.
  • Load lock chamber prepared for dust samples pumping, with internal bakeout system.
  • Cleaver chamber for cleaving the samples mounted in suitable sample holder.
  • High pressure chamber for heating up to 650°C and cooling the sample in controlled gas atmosphere under pressure to 2 MPa
  • Sample park chamber for 6 sample holders.
  • To minimize the vibration during AFM/STM measurement all mechanical pumps can be turned off and the vacuum in the system is generated by ion pumps and titanium sublimation pumps only.

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» Components

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Flood Source FS 40A1

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Ion Source 40C1

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Load Lock Chambers

» Load Lock Chambers

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Preparation Chambers

» Preparation Chambers

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Radial Distribution Chambers (UFO)

» Radial Distribution Chambers (UFO)

The radial distribution chambers (UFO) are designed to transfer samples between multiple preparation and analysis chambers that are connected to it.

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Storage Chambers

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The sample park chambers allow storage of up to 10 sample holders under UHV conditions.

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X-ray Source RS40B1

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PTS BASE CONTAINER sample holder

» PTS BASE CONTAINER sample holder

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PTS 1200 EB/C-K Mo sample holder

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PTS 2000 EB/C-C sample holder

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PTS 1200 DIR/C-K sample holder

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PTS CLEAV RES/C-K sample holder

» PTS CLEAV RES/C-K sample holder

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PTS CLEAV sample holder

» PTS CLEAV sample holder

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PTS 1000 IR RES/C-K sample holder

» PTS 1000 IR RES/C-K sample holder

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PTS 1000 OMC RES/C-K sample holder

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PTS 1400 OMC EB/C-K sample holder

» PTS 1400 OMC EB/C-K sample holder

The PTS 1400 OMC EB/C-K sample holder adapts to flag style sample holders for systems that are equipped with STM.

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PTS 1200 RHK EB/C-K sample holder

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The PTS 1200 RHK EB/C-K sample holder has indirect sample heating up to 1200°C and cooling down to –170°C.

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PTS SPM DIR/C-K sample holder

» PTS SPM DIR/C-K sample holder

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PTS SPM CLEAV sample holder

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PTS SPM 2000 EB/C-C sample holder

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PTS QUARTZ sample holder

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PTS FARA sample holder

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PTS FARA EXTRA CAPABILITY sample holder

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MINI PTS sample holder

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PTS 200 RES sample holder

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The PTS 200 RES sample holder features a heated, rotating wire of 129mm L and 0.5mm dia (max) for vapor deposition experiments.

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Flag style sample holders

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Commonly used sample holder for a wide range of applications.

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Deposition holders

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» Electronics

Bakeout Control Unit BCU14

» Bakeout Control Unit BCU14

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X-Ray Source Electronics XR40B

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XR40B-EC Emission controller is used to control the emission current of the X-ray source RS 40B1.

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