Analytical systems

UHV Multichamber XPS - IR system [project 256]

Description

Multitechnique IR-UHV system offering a wide range of surface characterisation techniques, including:

  • X-Ray Photoelectron Spectroscopy (XPS),
  • Ultraviolet Photoelectron Spectroscopy (UPS)
  • Angle-Resolved Photoemission Spectroscopy (ARPES)

The setup is optimized for Infrared (IR)-spectroscopy, it is the first UHV-system on the market allowing to record data using IR reflection-absorption spectroscopy (IRRAS) on dielectric substrates (oxides, nitrides) in a routine fashion.

A flexible sample holder with integrated heating allows for the application of a variety of sample preparation procedures. A sample transfer system and two radial distribution chambers offer a maximum of flexibility.

  • FT-IRRAS for wide range of sample temperatures: 28 K - 2200 K (depending on sample holder) - 28 K are reached in less than 15 min
  • Separate sample preparation chamber equipped with a low energy electron diffraction (LEED) system
  • Multitechnique analysis chamber with high-performance electron-energy analyzer R4000
  • High-performance Vertex 80v IR spectrometer

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» Components

Analytical Chamber

» Analytical Chamber

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Effusion Cell EF 40C1

» Effusion Cell EF 40C1

EF 40C1 Effusion Cell (Knudsen Cell) is a source designed for indirect resistive heating and delivering highly constant evaporation rates.

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Electron beam evaporator EBV 40A1

» Electron beam evaporator EBV 40A1

The electron beam evaporator EBV 40A1 is designed for ultra-pure sub-monolayer and multilayer MBE thin film growth.

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Electron Source ES 40C1

» Electron Source ES 40C1

Scanable electron gun with small spot profile.

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Flood Source FS 40A1

» Flood Source FS 40A1

Low cost electron flood source for charge neutralisation of insulators or semiconductors in XPS/AES and SIMS applications.

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Infrared Chamber

» Infrared Chamber

Designed for IR spectroscopic investigations.

 

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Ion Source IS 40C1

» Ion Source IS 40C1

Compact, easy-to-use extractor type ion gun for sample surface cleaning.

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Ion Source IS 40E1

» Ion Source IS 40E1

Two lens, extractor type, focused and differentially pumped ion gun.

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Load Lock Chamber

» Load Lock Chamber

Provides a fast and clean method of introducing samples into UHV systems.

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Preparation Chamber

» Preparation Chamber

For standard sample preparation techniques, thin film growth, sputtering, annealing and advanced preparation techniques with in-situ characterisation.

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Quartz Balance QO 40A1

» Quartz Balance QO 40A1

The Quartz Balance QO 40A1 provides a real-time, progressive indication of coating thickness during deposition, for high accuracy and reproducibility in coatings production.

 
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Radial Distribution Chamber (UFO)

» Radial Distribution Chamber (UFO)

Designed to transfer samples between multiple analysis, deposition or preparation chambers that are connected to it.

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Reorientation Chamber

» Reorientation Chamber

Receive, reorient and transfer a sample holder from one transfer mechanism to another.

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Storage Chamber

» Storage Chamber

The storage chambers allow storage of up to 10 sample holders under UHV conditions.

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Thermal Desorption Spectrometer TDS 40A1

» Thermal Desorption Spectrometer TDS 40A1

The TDS 40A1 is designed for Temperature Programmed Desorption (TPD) applications.

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UV Source UVS 40A2

» UV Source UVS 40A2

High intensity photon source that can be operated with a variety of discharge gases.

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X-ray Source RS 40B1

» X-ray Source RS 40B1

High intensity twin anode Al/Mg source optimized for XPS and high pressure XPS experiments.

 
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PTS STANDARD sample holder

» PTS STANDARD sample holder

The PTS STANDARD sample holder for easy sample mounting and optional BIAS current measurement.

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PTS POWDER sample holder

» PTS POWDER sample holder

The PTS POWDER SAMPLE HOLDER is designed for powder samples that do not require heating or cooling.

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PTS BASE CONTAINER sample holder

» PTS BASE CONTAINER sample holder

The PTS BASE CONTAINER SAMPLE HOLDER is designed as an adapter to accept samples up to 50mm diameter and 7.5mm thick.

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PTS 1000 RES/C-K sample holder

» PTS 1000 RES/C-K sample holder

The PTS 1000 RES/C-K sample holder has indirect (resistive) sample heating up to 1000°C and cooling to –170°C.

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PTS 1000 RES/C WITH EXTRA CONTACT sample holder

» PTS 1000 RES/C WITH EXTRA CONTACT sample holder

PTS 1000 RES/C-K sample holder with extra contacts is specifically for use in the MBE Chamber.

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PTS 1200 EB/C-K Mo sample holder

» PTS 1200 EB/C-K Mo sample holder

The PTS 1200 EB/C-K Mo sample holder features electron beam sample heating up to 1200°C, and cooling to –180°C.

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PTS 2000 EB/C-C sample holder

» PTS 2000 EB/C-C sample holder

The PTS 2000 EB/C-C sample holder features electron beam sample heating up to 2000°C and is designed specifically for high temperature experiments.

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PTS 1200 DIR/C-K sample holder

» PTS 1200 DIR/C-K sample holder

The PTS with Direct Heating holder allows direct heating of the sample up to 1200°C and cooling down to -170°C.

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PTS 700/-90 HPC RES/C-K RG sample holder

» PTS 700/-90 HPC RES/C-K RG sample holder

The PTS HPC RES/C-K RG sample holder is dedicated for the High Pressure Cell (reactor).

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PTS 700/-90 HPC RES/C-K RG PS sample holder

» PTS 700/-90 HPC RES/C-K RG PS sample holder

The PTS HPC RES/C-K RG Sample Holder is for high pressure, reactive gas studies of powdered catalyst samples.

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PTS CLEAV RES/C-K sample holder

» PTS CLEAV RES/C-K sample holder

The PTS CLEAV RES/C-K is specifically designed for sample cleaving.

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PTS CLEAV sample holder

» PTS CLEAV sample holder

The PTS CLEAV Sample Holder is a version of the PTS CLEAV RES/C-K holder without heating or cooling capabilities.

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PTS 1000 IR RES/C-K sample holder

» PTS 1000 IR RES/C-K sample holder

The PTS 1000 IR RES/C-K Sample Holder is designed specifically for optical transmission spectroscopy (IR, UV) over the temperature range –170°C to 1000°C.

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PTS 1000 OMC RES/C-K sample holder

» PTS 1000 OMC RES/C-K sample holder

The PTS 1000 OMC RES/C-K sample holder adapts to flag style sample holders for systems that are equipped with STM.

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PTS 1400 OMC EB/C-K sample holder

» PTS 1400 OMC EB/C-K sample holder

The PTS 1400 OMC EB/C-K sample holder adapts to flag style sample holders for systems that are equipped with STM.

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PTS 1200 RHK EB/C-K sample holder

» PTS 1200 RHK EB/C-K sample holder

The PTS 1200 RHK EB/C-K sample holder has indirect sample heating up to 1200°C and cooling down to –170°C.

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PTS SPM DIR/C-K sample holder

» PTS SPM DIR/C-K sample holder

The PTS SPM DIR/C-K Sample Holder is for SPM work and is equipped with direct sample heating and cooling over the range -170°C to 1200°C.

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PTS SPM CLEAV sample holder

» PTS SPM CLEAV sample holder

The PTS SPM Cleav sample holder combines sample cleaving capabilities with SPM compatibility over the temperature range -170°C to 600°C (indirectly heated).

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PTS SPM 2000 EB/C-C sample holder

» PTS SPM 2000 EB/C-C sample holder

The PTS SPM 2000 EB/C-C sample holder is for SPM work and is equipped with electron beam sample heating up to 2000°C.

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PTS QUARTZ sample holder

» PTS QUARTZ sample holder

The PTS QUARTZ sample holder is equipped with integrated quartz balance for deposition rate measurements.

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PTS FARA sample holder

» PTS FARA sample holder

The PTS FARA sample holder has integrated Faraday Cup with secondary electron suppressor for beam profile measurements.

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PTS FARA EXTRA CAPABILITY sample holder

» PTS FARA EXTRA CAPABILITY sample holder

The PTS Faraday Cup with extra capability Sample Holder has replaceable aperture plates.

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PTS 200 RES sample holder

» PTS 200 RES sample holder

The PTS 200 RES sample holder features a heated, rotating wire of 129mm L and 0.5mm dia (max) for vapor deposition experiments.

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Flag style sample holders

» Flag style sample holders

Commonly used sample holder for a wide range of applications.

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Deposition holders

» Deposition holders

Sample holders (substrate holders, plates, wafers, molyblocs) dedicated for different deposition techniques, such as MBE, magnetron sputtering, thermal evaporation and others.

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» Electronics

Bakeout Control Unit BCU14

» Bakeout Control Unit BCU14

Perfect unit dedicated for heating zones of the vacuum systems as well as heating samples inside the preparation chambers.

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Electron Beam Evaporator Power Supply EBV40A-PS

» Electron Beam Evaporator Power Supply EBV40A-PS

Designed for supplying Electron Beam Evaporator EBV40A used for evaporation of materials under UHV conditions.

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Electron Source Power Supply ES40-PS

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Allows fine adjustment of electron beam energy, density, position on the sample and also beam profile

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Flood Source Power Supply FS40-PS

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New power supply with touchscreen dedicated for Flood Source FS40A1.

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Sample Heating Power Supply HEAT3-PS

» Sample Heating Power Supply HEAT3-PS

Power supply operated by touchscreen with dual mode heating (resistive and electron bombardment) and high efficiency.

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Titanium Sublimation Pump Power Supply TSP03-PS

» Titanium Sublimation Pump Power Supply TSP03-PS

For constant filament current operation and features a thyristor and phase-control circuit for long-term and trouble-free TSP operation.

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Thickness Monitors Controller TMC-13

» Thickness Monitors Controller TMC-13

Newest technology electronics designed for monitoring and controlling any coating and deposition processes.

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UV Source Power Supply UV40A-PS

» UV Source Power Supply UV40A-PS

For controlling the UV source UV40A1 in ultraviolet photoelectron spectroscopy (UPS) applications.

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X-ray Source Electronics Set XR40B

» X-ray Source Electronics Set XR40B

XR40B electronics set is used to control the X-ray source RS 40B1.

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» Manipulators

Z Slide

» Z Slide

The Z Slide is a precision, high rigidity UHV specimen translator having Z motion.

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See more  ›

» Software

Recipe Editor

» Recipe Editor

Recipe Editor module is designed to perform technological process base on recipe. It give user possibility to create recurrent process.

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Chart 2D

» Chart 2D

Chart 2D module give user access to see graphic representation of data in time. User can select which data he want to see, also has possibility to configure axes.

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ION Source Control

» ION Source Control

ION Source Power Supply software extension for data acquisition and convenient control.

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X-Ray Source Control

» X-Ray Source Control

X-RAY Source Power Supply software extension for data acquisition and convenient control.

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UV Source Control

» UV Source Control

UV Source Power Supply software extension for data acquisition and convenient control.

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Electron Source Control

» Electron Source Control

ES Source Power Supply software extension for data acquisition and convenient control.

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Heating & Temperature Controller

» Heating & Temperature Controller

Heating & Temperature Controller software extension for data acquisition and convenient control.

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Multi-Gauge Control

» Multi-Gauge Control

Multi Gauge Controller software extension for data acquisition and convenient control.

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Electron Beam Evaporator Control

» Electron Beam Evaporator Control

Electron Beam Evaporator Controller software extension for data acquisition and convenient control.

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Residual Gas Analyzer

» Residual Gas Analyzer

The RGA module allows fully functional control of residual gas analyzers.

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Multiaxes Manipulator Control Application

» Multiaxes Manipulator Control Application

The Multi-Axis Control application has been designed for simple control of up to 6 motorized manipulator axes.

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Quartz Balance Control Application

» Quartz Balance Control Application

Measurement of frequency, rate and thickness from both channels simultaneously.

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Bakeout Control

» Bakeout Control

Full software control of bakeout time and temperature.

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PCU Control

» PCU Control

Full software control of a single vacuum/UHV system including pumps, valves and pressure gauge set.

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Heater Power Supply Control

» Heater Power Supply Control

Full software control of current and voltage.

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Titanium Sublimation Pump (TSP) Control

» Titanium Sublimation Pump (TSP) Control

Full software control of current, run time per filament, off time per filament, number of active filaments (up to four) and cycle count.

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Molecular Beam Epitaxy

» Molecular Beam Epitaxy

The MBE Control Module is our dedicated, easy to use software package for long term, stable control of MBE growth processes.

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Thermal Desorption Spectrometer

» Thermal Desorption Spectrometer

TDS Control Application allows precise control of Thermal Desorption Spectroscopy processes with fully integrated management of a temperature controller and mass spectrometer combination.

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Spectrium

» Spectrium

PREVAC acquisition and analyser control software.

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Synthesium

» Synthesium

New software dedicated to vacuum deposition applications.

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