Analytical systems

XPS system [project 212]

Description

Analytical chamber designed for X-ray photoelectron spectroscopy (XPS), integrated with multichamber vacuum system for thin
film deposition.

System configuration

  • Analytical chamber from mu-metal with sublimation pump andoptional TMP
  • 5-axis manipulator
  • Detector XPS/UPS/ARPES
  • X-ray source with monochromator
  • UV source
  • Electron source
  • Ion source
  • Mapping
  • Distribution chamber with TMP pumping system
  • Load Lock chamber
  • Storage chamber
  • Bake-out system
  • Cabinet for all electronics
  • Software

Related products

» Systems

XPS UPS Photoelectron Spectrometer [project 454]

» XPS UPS Photoelectron Spectrometer [project 454]

The UHV ESCA system dedicated for investigation of the chemical and physical properties of solid state surfaces in wide temperature and pressure ranges by different methods under very well controlled conditions.

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Deposition system with door access [project 244]

» Deposition system with door access [project 244]

Deposition system which offers the flexibility of several techniques in a single chamber.

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Multichamber ESCA UHV system [project 053]

» Multichamber ESCA UHV system [project 053]

Customized multi chamber UHV system dedicated for investigation of the chemical and physical properties of solid state surfaces in wide temperature and pressure ranges.

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Sputtering system [project 241]

» Sputtering system [project 241]

UHV magnetron sputtering system dedicated to accurate and reproducible thin film layer deposition. It is configured to allow sputtering from both magnetic and non-magnetic target materials alike.

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» Components

4-5 axes Universal Manipulators

» 4-5 axes Universal Manipulators

Spectroscopy UHV manipulators with heating and LN2 cooling possibility.

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Hemispherical Energy Analyser EA15

» Hemispherical Energy Analyser EA15

The EA15 provides high-resolution PES measurements with a 150 mm mean radius analyser.

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PTS 2000 EB/C-C sample holder

» PTS 2000 EB/C-C sample holder

The PTS 2000 EB/C-C sample holder features electron beam sample heating up to 2000°C and is designed specifically for high temperature experiments.

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High Pressure Cell Manipulators

» High Pressure Cell Manipulators

Specially designed 3-axes high pressure cell manipulator with IR laser heating possibility.

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» Electronics

X-ray Source Electronics Set XREC20

» X-ray Source Electronics Set XREC20

XREC20 electronics set dedicated for controlling SAX X-ray sources.

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Electron Source Power Supply ES40-PS

» Electron Source Power Supply ES40-PS

Allows fine adjustment of electron beam energy, density, position on the sample and also beam profile

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X-ray Source Emission Controller XR40B-EC

» X-ray Source Emission Controller XR40B-EC

The XR40B-EC electronic unit controls the X-ray source emission current.

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Titanium Sublimation Pump Power Supply TSP03-PS

» Titanium Sublimation Pump Power Supply TSP03-PS

For constant filament current operation and features a thyristor and phase-control circuit for long-term and trouble-free TSP operation.

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» Software

Synthesium

» Synthesium

New software dedicated to vacuum deposition applications.

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Application for Thermal Desorption Spectroscopy

» Application for Thermal Desorption Spectroscopy

Used to control the power, preparing a recipe for heating and acquisition of measured data.

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Spectrium

» Spectrium

Control and data acquisition software dedicated to EA15 class analysers.

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