Analytical systems

XPS system [project 212]

Description

Analytical chamber designed for X-ray photoelectron spectroscopy (XPS), integrated with multichamber vacuum system for thin
film deposition.

System configuration

  • Analytical chamber from mu-metal with sublimation pump andoptional TMP
  • 5-axis manipulator
  • Detector XPS/UPS/ARPES
  • X-ray source with monochromator
  • UV source
  • Electron source
  • Ion source
  • Mapping
  • Distribution chamber with TMP pumping system
  • Load Lock chamber
  • Storage chamber
  • Bake-out system
  • Cabinet for all electronics
  • Software

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» Systems

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» Components

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» Electronics

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» Software

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