XPS system [project 090]
This multifunctional system is designed for precise and varied analysis of material surfaces.
The system consists of a main frame of fixed vacuum chambers; analysis chamber, preparation chamber, load lock chamber and linear transfers. All frames are independent and supplied on castors with screw locking sets for floor positioning. The frames can be disconnected and moved to other positions within the laboratory as necessary. Each frame is also equipped with its own bakeout tent. The system is extremely versatile and can be further extend in the future to add e.g. cleaver chamber, storage chamber and/or PLD chamber.
The system has an independent free-standing controller cabinet for both vacuum and instrumentation devices.
The UHV system comprises various interlocked turbo-molecular pumping sets, ion pumps and titanium sublimation pumps. The pumping systems, gauges and valves (safety and vent), are fully microprocessor and software controlled with full safety interlocks.
The various chambers are internally illuminated with fiber optics outlets for surveillance of the sample transfer/holder mechanisms between chambers.
The system is equipped with a distilled water chiller.
Various sample holders are supplied to provide a wide range of heating and cooling capabilities.