UHV system [project 434]
Sample transport system for a UHV sample preparation facility with UHV surface preparation and analysis module.
Transferring system
Flag Style sample holder, “shuttles”.
System configuration
- Radial Distribution Chamber for transferring the samples between attached chambers under UHV conditions – semi motorized
- Shuttle transfer module – allows to transfer special type of sample holder - shuttles
- Preparation chamber including:
- Ion sputter source for sample cleaning
- Blade cleaver
- Scraper
- Shuttle heating stage
- Storage for 5 shuttles
- Rotary drive
- Fast entry load lock chamber - allows to load two shuttles
- Vertical transfer tunnel - allows to transfer two shuttles between two chamber
- UHV surface preparation and analysis module including:
- 4 UHV single evaporators
- RHEED system
- Flashing machine
- Optical pyromiter
- Cooling stage
- Ion sputter source
- Gas dosing system
- LEED system
- Cylindrical mirror analyzer
- 4-axes manipulator, motorized with integrated quartz balance and shutter for wedge growth, LN2 cooling and possibility of heating the sample up to 1000°C
- Accessories:
- Set of sample holders
- Bakeout system
- 19" rack cabinets for all electronic units
- Support frame
- LED lighting