Analytical systems for synchrotrons

Multitechnique Ultra High Vacuum System [project 424]

Description

Customized multichamber UHV system (EMIL) for transfer between the silicon thin film deposition cluster, the SISSY@EMIL end‐station and other analysis tools, load‐lock and storage chambers located along the sample transfer system and the radial distribution chamber. The silicon thin film deposition cluster is connected to the SISSY@EMIL end‐station via the handler transfer chamber, the sample separation chamber, a modular ultra‐high vacuum sample transfer system and a radial distribution chamber.

Specification

The EMIL multichamber system is focuses on materials research for a sustainable, economic and secure energy supply in the future. EMIL is dedicated to the state-of-the-art synthesis and in-situ and in-operando X-ray analysis of materials and devices for energy conversion, energy storage, and energy efficiency. Work at EMIL will cover the range from basic and applied material science over technology and prototype development to industrial research. Research at EMIL will cover a broad range of energy-related topics including photovoltaics (PV), solar fuels, bio-mass to liquid fuels, thermoelectric materials, electrode materials for batteries, hydrogen storage, energy saving catalysts for the chemical industry for processes such as ammonia production, and new fields will develop as external users and industry will perform their research at EMIL.

EMIL combines a large variety of synthesis and deposition techniques for various material classes with sophisticated synchrotron-based analytics which can probe thin-layer and interface properties with both lateral and in-depth resolution on the nanometer scale. The promising approach is the coupling of different synchrotron-based X-ray characterization techniques with relevant deposition and post-treatment capabilities in one dedicated vacuum system.

EMIL is designed such that it can serve up to three experimental end-stations that each can simultaneously access soft and hard X-rays in the very wide energy range of 80 eV – 10 keV, and comprises all characterization and deposition facilities in one integrated ultra-high vacuum system. In addition, a PINK beam end station is planned to enable a high flux source of 2-10 keV photons for dispersive X-ray emission spectroscopy (XES).

 

  • Fully automated transferring system operated by RAPID SE
  • 17 chambers and among them 4 radial distribution chambers
  • Prepared for samples from 10x10mm up to 6 inch
  • Wide range of temperature - from LN2 level up to 1450oC
  • Base pressurre 10-10 mbar during transferring
  • Storage for 65 sample holders

 

 

Copyrights © belongs to the HZB and PREVAC.

Related products

» Systems

Magnetron sputtering system [project 229]

» Magnetron sputtering system [project 229]

Magnetron sputtering system dedicated to accurate and reproducible thin film layer deposition.

read more
ARTOF Analysis System [project 390]

» ARTOF Analysis System [project 390]

Dedicated system for ARTOF experiments with controllable sample temperature from 7 K to 400 K (PID controlled).

read more
1mbar XPS UPS system [project 522]

» 1mbar XPS UPS system [project 522]

System dedicated for XPS (ESCA)/UPS experiments in pressure range 1 mbar - 10-10 mbar with controllable sample temperature.

read more
UHV multichamber cluster tool [project 526]

» UHV multichamber cluster tool [project 526]

Multichamber deposition setup with tunnel transferring system.

read more
See more  ›

» Components

1-4 axes Sputtering Manipulators

» 1-4 axes Sputtering Manipulators

Designed for sputter deposition applications (including reactive sputtering).

read more
Transferring Tunnel

» Transferring Tunnel

Transferring tunnel is used to transfer samples between UHV chambers, in a stable and easy-to-operate way.

read more
Electron Source ES 40C1

» Electron Source ES 40C1

Scanable electron gun with small spot profile.

read more
X-ray Source RS 40B1

» X-ray Source RS 40B1

High intensity twin anode Al/Mg source optimized for XPS and high pressure XPS experiments.

 
read more
See more  ›

» Electronics

Titanium Sublimation Pump Power Supply TSP03-PS

» Titanium Sublimation Pump Power Supply TSP03-PS

For constant filament current operation and features a thyristor and phase-control circuit for long-term and trouble-free TSP operation.

read more
Stepper Motor Control Device SMCD12

» Stepper Motor Control Device SMCD12

Control the high power stepper motors in applications where either higher speeds and/or higher torques are required.

read more
Ion Source Power Supply IS40-PS

» Ion Source Power Supply IS40-PS

High stability & low noise power supply, which can be configured to work with IS40C1 or IS40E1 Ion Sources.

read more
X-ray Source Electronics Set XREC20

» X-ray Source Electronics Set XREC20

XREC20 electronics set dedicated for controlling SAX X-ray sources.

read more
See more  ›

» Software

Spectrium

» Spectrium

Control and data acquisition software dedicated to EA15 class analysers.

read more
Application for Thermal Desorption Spectroscopy

» Application for Thermal Desorption Spectroscopy

Used to control the power, preparing a recipe for heating and acquisition of measured data.

read more
Synthesium

» Synthesium

New software dedicated to vacuum deposition applications.

read more
See more  ›

TOP

Important:
this site uses cookie files.

We use information saved in cookie files, among others, in statistical purposes and in order to fit the service to individual needs of the user. In your browser you can change your cookie files settings.

Using the site without changing cookie files settings means they will be saved in device memory. More information with tips how to change settings can be found in Privacy policy.

Close

Query list

Ask