Deposition systems

Advanced, multi-technique systems for UHV surface science
Magnetron sputtering system [project 128]

» Magnetron sputtering system [project 128]

The magnetron sputtering system is dedicated to accurate and reproducible thin film layer deposition.

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Deposition system with door access [project 116]

» Deposition system with door access [project 116]

The system is versatile R&D tool offering the flexibility of multi-deposition techniques in a single platform.

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UHV system [project 063]

» UHV system [project 063]

Ultra high vacuum system for investigation of surface conditions of samples under controlled conditions.

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Automated deposition system

» Automated deposition system

Advanced research platform for thin film growth by MBE technology.

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