Deposition systems

PLD system [project 198]

UHV cluster with PLD chamber and mobile preparation chamber.

Transferring system

PTS Sample holders, also adapters for flag style sample holders

System configuration

- PLD chamber:

  • 5-axis motorized manipulator with integrated quartz balance and shutter for wedge growth
  • Target manipulator (for six 1” targets), motorized
  • Diode laser for sample heating up to 1200K
  • KrF excimer laser COMPex Pro 201F
  • 30keV RHEED
  • Gas dosing system
  • Computer control

- Radial Distribution Chamber for transferring the samples between attached chambers under UHV conditions

- Load Lock chamber which allows to load up to 3 PTS sample holders/target holders

- Storage Chamber including park mechanism for 10 PTS sample holders/target holders

- Two-level Preparation chamber (mobile):

  • High precision 5-axis manipulator with LN2 cooling and possibility of heating up to 2000°C
  • LEED/Auger
  • Ion sputter source for sample cleaning
  • Small load lock chamber
  • RGA 100AMU

- Accessories:

  • Set of sample holders
  • Bakeout system
  • 19" rack cabinets for all electronic units
  • Support frame
  • LED lighting

Related products

» Systems

UHV-HP AFM System [project 539]

» UHV-HP AFM System [project 539]

A unique AFM system ready to work in a range from UHV to 1 atm.

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HIPIMS system [project 335]

» HIPIMS system [project 335]

The HIPIMS Reactor is a dual purpose deposition chamber. It allows accurate and reproducible thin film layer deposition and extensive plasma diagnostic investigation.

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Deposition system with door access [project 365]

» Deposition system with door access [project 365]

 

UHV sputtering system dedicated to accurate and reproducible thin film layer deposition. It is configured to allow sputtering from two special design electron source.

 

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Multitechnique Ultra High Vacuum System [project 424]

» Multitechnique Ultra High Vacuum System [project 424]

EMIL Analytics Project. Multifunctional, multichamber ultra high vacuum analytical system.

 

 

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» Components

PTS 1000 IR RES/C-K sample holder

» PTS 1000 IR RES/C-K sample holder

The PTS 1000 IR RES/C-K Sample Holder is designed specifically for optical transmission spectroscopy (IR, UV) over the temperature range –170°C to 1000°C.

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PTS SPM 2000 EB/C-C sample holder

» PTS SPM 2000 EB/C-C sample holder

The PTS SPM 2000 EB/C-C sample holder is for SPM work and is equipped with electron beam sample heating up to 2000°C.

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R2/R3 Tilt Modules (combined with XY Stages)

» R2/R3 Tilt Modules (combined with XY Stages)

Provides short inclination in relation to one of the orthogonal directions (X or Y axis) in the ± 3° range.

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Hemispherical Energy Analyser EA15

» Hemispherical Energy Analyser EA15

The EA15 provides high-resolution PES measurements with a 150 mm mean radius analyser.

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» Electronics

UV Source Power Supply UV40A-PS

» UV Source Power Supply UV40A-PS

For controlling the UV source UV40A1 in ultraviolet photoelectron spectroscopy (UPS) applications.

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Ion Source Power Supply IS40-PS

» Ion Source Power Supply IS40-PS

High stability & low noise power supply, which can be configured to work with IS40C1 or IS40E1 Ion Sources.

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Bakeout Control Unit BCU14

» Bakeout Control Unit BCU14

Perfect unit dedicated for heating zones of the vacuum systems as well as heating samples inside the preparation chambers.

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X-ray High Voltage Power Supply XRHV01-PS

» X-ray High Voltage Power Supply XRHV01-PS

High voltage power supply for X-ray source RS 40B1.

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» Software

Spectrium

» Spectrium

Control and data acquisition software dedicated to EA15 class analysers.

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Application for Thermal Desorption Spectroscopy

» Application for Thermal Desorption Spectroscopy

Used to control the power, preparing a recipe for heating and acquisition of measured data.

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Synthesium

» Synthesium

New software dedicated to vacuum deposition applications.

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