Deposition systems

Deposition system with door access [project 334]

Our family of deposition systems offer the flexibility of several techniques in a single chamber. Each system in the range features a universal mounting flange (320 mm dia.) which can be configured for specific deposition 
techniques or combination of
techniques. A modular, user friendly
 approach to system design means that
 the entire system can be reconfigured by 
simply changing the universal mounting flange,
a process that has been made both fast and 
simple. For demanding applications that require UHV base pressures, the systems can also be configured with appropriate sealing and pumping systems to achieve a guaranteed minimum of 10-9 mbar.

A unique feature of these systems is that the source mounting stage on the bottom face of the chamber is designed so that it can be effortlessly exchanged with matching stages that are configured with thermal, e-beam or combination sources, providing a truly multi-technique, multi-deposition system that is ideal for both small scale production and R&D prototyping. Systems are equipped with a transfer port for future connection to e.g. UHV cluster apparatus.

The systems can be configured with:

  • thermal evaporation boats
  • magnetron sources

  • crucibles
  • effusion cells

  • e-beam sources
  • combinations of the above

Each source type can be equipped with manual or automatic shutters and the entire system can also be supplied with semi-automatic or fully-automatic control via pneumatic actuation. A wealth of spare flanges and viewports enable future expansion and ancillary equipment to be mounted whilst the deposition chamber itself is equipped with a large, easy access vacuum door which has differential pumping. This maintains an excellent base pressure whilst providing easy access to the internals. The system also employs efficient double wall water cooling throughout.

In the standard configuration the chamber is equipped for multi-sample mounting via 1′′ or 2′′ substrate holders but other sizes can be accommodated on request.

There are a range of sample manipulator options to provide the widest possible access to substrate conditions including full 360 degree rotation with stage heating and cooling.

The free chamber ports can be populated with a range of instrumentation including:

  • ion sources
  • thickness monitor
  • residual analyser
  • load lock chamber with transfer
  • gas dosing system

The systems are delivered with all necessary power supplies and control units in a stand-alone 19′′ cabinet system with fully interlocked and protected vacuum, process and vent control.

A comprehensive PC control and data acquisition system is available as an option and also allows ancillary techniques and devices to be fully integrated.

Related products

» Systems

Magnetron Sputtering System <br> [project 533]

» Magnetron Sputtering System
[project 533]

System for research and development for thin film coating of substrate with different materials.

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PLD system [project 451]

» PLD system [project 451]

High resolution Photoemision Spectrometer integrated with in-situ thin film pulsed laser deposition set up.

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UHV deposition system [project 373]

» UHV deposition system [project 373]

Modular platform for thin layers deposition.

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Multichamber XPS/UPS system for catalyst research [project 010]

» Multichamber XPS/UPS system for catalyst research [project 010]

A custom multi-chamber UHV system for the investigation of physical and chemical properties of novel catalyst materials.

read more
See more  ›

» Components

Deposition holders

» Deposition holders

Sample holders (substrate holders, plates, wafers, molyblocs) dedicated for different deposition techniques, such as MBE, magnetron sputtering, thermal evaporation and others.

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Mirror/Gratings System Manipulators

» Mirror/Gratings System Manipulators

Multi-axis manipulator in order to determine the correct direction of the beam.

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The PTS Faraday Cup with extra capability Sample Holder has replaceable aperture plates.

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Special Chambers

» Special Chambers

Custom designed and fabricated UHV chambers and complete vacuum systems for a wide range of applications.

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See more  ›

» Electronics

Stepper Motor Control Device SMCD10

» Stepper Motor Control Device SMCD10

Control the low power stepper motors in applications where high speed and high torque is not very important.

read more
UV Source Power Supply UV40A-PS

» UV Source Power Supply UV40A-PS

For controlling the UV source UV40A1 in ultraviolet photoelectron spectroscopy (UPS) applications.

read more
Flood Source Power Supply FS40-PS

» Flood Source Power Supply FS40-PS

New power supply with touchscreen dedicated for Flood Source FS40A1.

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Magnetron Power Supply M600DC-PS

» Magnetron Power Supply M600DC-PS

Compact switch-mode power supply designed to drive magnetron sources.

read more
See more  ›

» Software


» Synthesium

New software dedicated to vacuum deposition applications.

read more
Application for Thermal Desorption Spectroscopy

» Application for Thermal Desorption Spectroscopy

Used to control the power, preparing a recipe for heating and acquisition of measured data.

read more

» Spectrium

Control and data acquisition software dedicated to EA15 class analysers.

read more
See more  ›


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