UHV system for thin film evaporation [project 382]
Customized deposition system dedicated for thin films organic materials deposition.
PTS Sample holder
- Two-level Preparation chamber:
- High precision 4-axis manipulator with LN2 cooling and EB heating up to 1200°C
- Ion sputter source for sample cleaning
- Deposition rate measurement system: Quartz Balance and Thickness monitor
- Low temperature Effusion Cell for organic materials
- Transferring system allows transferring samples between customers chamber and Preparation chamber in UHV conditions.
- Set of dedicated, multifunctional, multimaterial sample holders
- Special rack for all electronics unit
- Special design bakeout system
System prepared for future extension for LEED/AUGER measurement