Deposition systems

UHV system for thin film evaporation [project 382]

Customized deposition system dedicated for thin films organic materials deposition.

Transferring system:

PTS Sample holder

System configuration:

- Two-level Preparation chamber:

  • High precision 4-axis manipulator with LN2 cooling and EB heating up to 1200°C
  • Ion sputter source for sample cleaning
  • Deposition rate measurement system: Quartz Balance and Thickness monitor
  • Low temperature Effusion Cell for organic materials
  • RGA

 

- Transferring system allows transferring samples between customers chamber and Preparation chamber in UHV conditions.

- Accessories:

  • Set of dedicated, multifunctional, multimaterial sample holders
  • Special rack for all electronics unit
  • Special design bakeout system

System prepared for future extension for LEED/AUGER measurement

 

 

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» Components

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» Electronics

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