Deposition systems

UHV system for thin film evaporation [project 382]

Customized deposition system dedicated for thin films organic materials deposition.

Transferring system:

PTS Sample holder

System configuration:

- Two-level Preparation chamber:

  • High precision 4-axis manipulator with LN2 cooling and EB heating up to 1200°C
  • Ion sputter source for sample cleaning
  • Deposition rate measurement system: Quartz Balance and Thickness monitor
  • Low temperature Effusion Cell for organic materials
  • RGA

 

- Transferring system allows transferring samples between customers chamber and Preparation chamber in UHV conditions.

- Accessories:

  • Set of dedicated, multifunctional, multimaterial sample holders
  • Special rack for all electronics unit
  • Special design bakeout system

System prepared for future extension for LEED/AUGER measurement

 

 

Related products

» Systems

MBE system [project 531]

» MBE system [project 531]

Stand-alone MBE sytem with fast intro chamber.

read more
Deposition system with door access [project 368]

» Deposition system with door access [project 368]

UHV magnetron sputtering system dedicated to accurate and reproducible thin film layer deposition. It is configured to allow sputtering from both magnetic and non-magnetic target materials alike.

read more
Analytical UHV system integrated with MBE chamber [project 473]

» Analytical UHV system integrated with MBE chamber [project 473]

A analytical UHV system dedicated for investigation of the chemical and physical properties of solid state surfaces in UHV conditions integrated with MBE chamber.

read more
ARTOF Analysis System [project 390]

» ARTOF Analysis System [project 390]

Dedicated system for ARTOF experiments with controllable sample temperature from 7 K to 400 K (PID controlled).

read more
See more  ›

» Components

1-4 axes PLD Target Manipulators

» 1-4 axes PLD Target Manipulators

Designed for target positioning in pulsed laser deposition applications.

 

read more
Ion Source IS 40E1

» Ion Source IS 40E1

Two lens, extractor type, focused and differentially pumped ion gun.

read more
Differentially Pumped Rotary Feedthroughs

» Differentially Pumped Rotary Feedthroughs

Provides 360° of continuous rotary freedom through the vacuum wall of a UHV system

read more
4-6 axes Helium Manipulators (Closed Cycle)

» 4-6 axes Helium Manipulators (Closed Cycle)

Spectroscopy UHV manipulators with heating and LHe cooling (closed cycle) possibility.

read more
See more  ›

» Electronics

Sample Heating Power Supply HEAT3-PS

» Sample Heating Power Supply HEAT3-PS

Power supply operated by touchscreen with dual mode heating (resistive and electron bombardment) and high efficiency.

read more
Thickness Monitors Controller TMC-13

» Thickness Monitors Controller TMC-13

Newest technology electronics designed for monitoring and controlling any coating and deposition processes.

read more
Flood Source Power Supply FS40-PS

» Flood Source Power Supply FS40-PS

New power supply with touchscreen dedicated for Flood Source FS40A1.

read more
X-ray Source Electronics Set XR40B

» X-ray Source Electronics Set XR40B

XR40B electronics set is used to control the X-ray source RS 40B1.

read more
See more  ›

» Software

Synthesium

» Synthesium

New software dedicated to vacuum deposition applications.

read more
Application for Thermal Desorption Spectroscopy

» Application for Thermal Desorption Spectroscopy

Used to control the power, preparing a recipe for heating and acquisition of measured data.

read more
Spectrium

» Spectrium

Control and data acquisition software dedicated to EA15 class analysers.

read more
See more  ›

TOP
Newsletter

Important:
this site uses cookie files.

We use information saved in cookie files, among others, in statistical purposes and in order to fit the service to individual needs of the user. In your browser you can change your cookie files settings.

Using the site without changing cookie files settings means they will be saved in device memory. More information with tips how to change settings can be found in Privacy policy.

Close

Query list

Ask