Deposition systems

Deposition system for plasma evaporation [project 383]

RF PACVD System for deposition of carbon layers onto surface of medical implants made of the AISI316L medical steel.

Transferring system:

The chamber is equipped with a large, easy access vacuum door which is dual viton sealed with differential pumping in the seal interspace. This maintains an excellent base pressure whilst providing perfect internal access. 6’’ RF plate allows mounting elements with a different shape.

System configuration:

- Processing chamber:

  • High precision 6’’ table with RF electrode and RF power supply (5kW)
  • Automatic Gas dosing system
  • The deposition process is fully programmable via dedicated PC software and PLC controller.
  • Additional ports dedicated for integrate liquid precursors dosing system

- Accesoriess:

  • Special rack for all electronics units

Related products

» Systems

PLD system [project 451]

» PLD system [project 451]

High resolution Photoemision Spectrometer integrated with in-situ thin film pulsed laser deposition set up.

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UHV deposition system [project 373]

» UHV deposition system [project 373]

Modular platform for thin layers deposition.

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Multitechnique UHV system for multilayer epitaxial films [project 022]

» Multitechnique UHV system for multilayer epitaxial films [project 022]

Custom multi-chamber UHV system for the analysis of atomic and electronic surface structure, in­vestigation and preparation of complex epitaxial me­tallic or molecular films on surfaces and chemical analysis of interfaces in multilayer film samples.

read more
Multifunctional ESCA system [project 125]

» Multifunctional ESCA system [project 125]

Customized multi chamber UHV system dedicated for investigation of the chemical and physical properties of solid state surfaces in wide temperature and pressure ranges.

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See more  ›

» Components

4-6 axes Helium Manipulators (Closed Cycle)

» 4-6 axes Helium Manipulators (Closed Cycle)

Spectroscopy UHV manipulators with heating and LHe cooling (closed cycle) possibility.

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PTS 1000 RES/C WITH EXTRA CONTACT sample holder

» PTS 1000 RES/C WITH EXTRA CONTACT sample holder

PTS 1000 RES/C-K sample holder with extra contacts is specifically for use in the MBE Chamber.

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PTS 2000 EB/C-C sample holder

» PTS 2000 EB/C-C sample holder

The PTS 2000 EB/C-C sample holder features electron beam sample heating up to 2000°C and is designed specifically for high temperature experiments.

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PTS CLEAV sample holder

» PTS CLEAV sample holder

The PTS CLEAV Sample Holder is a version of the PTS CLEAV RES/C-K holder without heating or cooling capabilities.

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See more  ›

» Electronics

Flood Source Power Supply FS40-PS

» Flood Source Power Supply FS40-PS

New power supply with touchscreen dedicated for Flood Source FS40A1.

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X-ray High Voltage Power Supply XRHV01-PS

» X-ray High Voltage Power Supply XRHV01-PS

High voltage power supply for X-ray source RS 40B1.

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UV Source Power Supply UV40A-PS

» UV Source Power Supply UV40A-PS

For controlling the UV source UV40A1 in ultraviolet photoelectron spectroscopy (UPS) applications.

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Ion Source Power Supply IS40-PS

» Ion Source Power Supply IS40-PS

High stability & low noise power supply, which can be configured to work with IS40C1 or IS40E1 Ion Sources.

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See more  ›

» Software

Application for Thermal Desorption Spectroscopy

» Application for Thermal Desorption Spectroscopy

Used to control the power, preparing a recipe for heating and acquisition of measured data.

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Synthesium

» Synthesium

New software dedicated to vacuum deposition applications.

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Spectrium

» Spectrium

Control and data acquisition software dedicated to EA15 class analysers.

read more
See more  ›

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