Deposition systems

Deposition system for plasma evaporation [project 383]

RF PACVD System for deposition of carbon layers onto surface of medical implants made of the AISI316L medical steel.

Transferring system:

The chamber is equipped with a large, easy access vacuum door which is dual viton sealed with differential pumping in the seal interspace. This maintains an excellent base pressure whilst providing perfect internal access. 6’’ RF plate allows mounting elements with a different shape.

System configuration:

- Processing chamber:

  • High precision 6’’ table with RF electrode and RF power supply (5kW)
  • Automatic Gas dosing system
  • The deposition process is fully programmable via dedicated PC software and PLC controller.
  • Additional ports dedicated for integrate liquid precursors dosing system

- Accesoriess:

  • Special rack for all electronics units

Related products

» Systems

Accelerator-analytical UHV system [project 412]

» Accelerator-analytical UHV system [project 412]

An analytical UHV system dedicated for investigation of the chemical and physical properties of solid state surfaces in wide temperatures and UHV conditions.

read more
Super resolution ARPES system with MBE chamber [project 523]

» Super resolution ARPES system with MBE chamber [project 523]

Multi-technique photo emission UHV system for super resolution ARPES measurements with integrated MBE chamber.

read more
High Pressure Photoemission Spectroscopy UHV System [project 487]

» High Pressure Photoemission Spectroscopy UHV System [project 487]

Superior performance analysis system for high pressure photoemission spectroscopy.

read more
See more  ›

» Components

Analytical Chamber

» Analytical Chamber

Designed for applications requiring the investigation of the chemical and physical properties of solid state surfaces, thin films and nanomaterials.

read more
Deposition holders

» Deposition holders

Sample holders (substrate holders, plates, wafers, molyblocs) dedicated for different deposition techniques, such as MBE, magnetron sputtering, thermal evaporation and others.

read more
0-axis Stages

» 0-axis Stages

For sample heating and cooling without any form of manipulation/rotation etc.

read more
1-3 axes Manipulators

» 1-3 axes Manipulators

Wide range of customised UHV manipulators with up to three othogonal axes XYZ.

read more
See more  ›

» Electronics

X-ray High Voltage Power Supply XRHV01-PS

» X-ray High Voltage Power Supply XRHV01-PS

High voltage power supply for X-ray source RS 40B1.

read more
X-ray Source Emission Controller XR40B-EC

» X-ray Source Emission Controller XR40B-EC

The XR40B-EC electronic unit controls the X-ray source emission current.

read more
Ion Multi Gauge Controller MG15

» Ion Multi Gauge Controller MG15

Able to support 4 active gauges and up to 3 passive gauges, extending the measurement range to 2×10-12 mbar.

read more
Bakeout Control Unit BCU14

» Bakeout Control Unit BCU14

Perfect unit dedicated for heating zones of the vacuum systems as well as heating samples inside the preparation chambers.

read more
See more  ›

» Software

Synthesium

» Synthesium

New software dedicated to vacuum deposition applications.

read more
Spectrium

» Spectrium

Control and data acquisition software dedicated to EA15 class analysers.

read more
Application for Thermal Desorption Spectroscopy

» Application for Thermal Desorption Spectroscopy

Used to control the power, preparing a recipe for heating and acquisition of measured data.

read more
See more  ›

TOP
Newsletter

Important:
this site uses cookie files.

We use information saved in cookie files, among others, in statistical purposes and in order to fit the service to individual needs of the user. In your browser you can change your cookie files settings.

Using the site without changing cookie files settings means they will be saved in device memory. More information with tips how to change settings can be found in Privacy policy.

Close

Query list

Ask