Deposition systems

Deposition system for plasma evaporation [project 383]

RF PACVD System for deposition of carbon layers onto surface of medical implants made of the AISI316L medical steel.

Transferring system:

The chamber is equipped with a large, easy access vacuum door which is dual viton sealed with differential pumping in the seal interspace. This maintains an excellent base pressure whilst providing perfect internal access. 6’’ RF plate allows mounting elements with a different shape.

System configuration:

- Processing chamber:

  • High precision 6’’ table with RF electrode and RF power supply (5kW)
  • Automatic Gas dosing system
  • The deposition process is fully programmable via dedicated PC software and PLC controller.
  • Additional ports dedicated for integrate liquid precursors dosing system

- Accesoriess:

  • Special rack for all electronics units

Related products

» Systems

Scanning XPS system [project 279]

» Scanning XPS system [project 279]

The UHV ESCA system dedicated for investigation of the chemical and physical properties of solid state surfaces in wide temperature and pressure ranges.

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Mirror / Gratings Systems

» Mirror / Gratings Systems

Vacuum mirror chambers are situated along the synchrotron beam line.

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IR system [project 075]

» IR system [project 075]

A system designed for IR measurements.

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Super resolution ARPES system with MBE chamber [project 523]

» Super resolution ARPES system with MBE chamber [project 523]

Multi-technique photo emission UHV system for super resolution ARPES measurements with integrated MBE chamber.

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» Components

Flow Through High Pressure Reactor

» Flow Through High Pressure Reactor

Designed to study reactions between gases and solid/powder samples under high pressure (beetwen reactor’s cups), in the reactor chamber under UHV conditions

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PTS FARA EXTRA CAPABILITY sample holder

» PTS FARA EXTRA CAPABILITY sample holder

The PTS Faraday Cup with extra capability Sample Holder has replaceable aperture plates.

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1-2 axes MBE Manipulators

» 1-2 axes MBE Manipulators

Designed for MBE applications under ultra-high vacuum conditions.

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X-ray Source with Monochromator RMC50

» X-ray Source with Monochromator RMC50

Based on ellipsoidal quartz crystal and operates according to Bragg Law of X-ray diffraction.

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» Electronics

Vacuum Chamber Highlight VCH-10

» Vacuum Chamber Highlight VCH-10

Perfect accessory for illuminating sample areas, source/accessory positions and movement regions within a UHV system.

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Thickness Monitors TM13 & TM14

» Thickness Monitors TM13 & TM14

The TM13 and TM14 devices comprise: quartz oscillator, frequency measuring system and communication interface.

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Flood Source Power Supply FS40-PS

» Flood Source Power Supply FS40-PS

New power supply with touchscreen dedicated for Flood Source FS40A1.

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Sample Heating Power Supply HEAT3-PS

» Sample Heating Power Supply HEAT3-PS

Power supply operated by touchscreen with dual mode heating (resistive and electron bombardment) and high efficiency.

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» Software

Synthesium

» Synthesium

New software dedicated to vacuum deposition applications.

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Application for Thermal Desorption Spectroscopy

» Application for Thermal Desorption Spectroscopy

Used to control the power, preparing a recipe for heating and acquisition of measured data.

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Spectrium

» Spectrium

Control and data acquisition software dedicated to EA15 class analysers.

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See more  ›

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