Deposition systems

Deposition system for plasma evaporation [project 383]

RF PACVD System for deposition of carbon layers onto surface of medical implants made of the AISI316L medical steel.

Transferring system:

The chamber is equipped with a large, easy access vacuum door which is dual viton sealed with differential pumping in the seal interspace. This maintains an excellent base pressure whilst providing perfect internal access. 6’’ RF plate allows mounting elements with a different shape.

System configuration:

- Processing chamber:

  • High precision 6’’ table with RF electrode and RF power supply (5kW)
  • Automatic Gas dosing system
  • The deposition process is fully programmable via dedicated PC software and PLC controller.
  • Additional ports dedicated for integrate liquid precursors dosing system

- Accesoriess:

  • Special rack for all electronics units

Related products

» Systems

Custom UHV system for OLED research [project 014]

» Custom UHV system for OLED research [project 014]

A custom multichamber UHV system for the preparation and investigation of organic films (OLEDs).

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PLD system [project 198]

» PLD system [project 198]

UHV cluster with PLD chamber and mobile preparation chamber.

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Mirror / Gratings Systems

» Mirror / Gratings Systems

Vacuum mirror chambers are situated along the synchrotron beam line.

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» Components

Thermal Desorption Spectrometer TDS 40A1

» Thermal Desorption Spectrometer TDS 40A1

The TDS 40A1 is designed for Temperature Programmed Desorption (TPD) applications.

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Ion Source IS 40C1

» Ion Source IS 40C1

Compact, easy-to-use extractor type ion gun for sample surface cleaning.

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PTS QUARTZ sample holder

» PTS QUARTZ sample holder

The PTS QUARTZ sample holder is equipped with integrated quartz balance for deposition rate measurements.

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Differentially Pumped Rotary Feedthroughs

» Differentially Pumped Rotary Feedthroughs

Provides 360° of continuous rotary freedom through the vacuum wall of a UHV system

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» Electronics

X-ray High Voltage Power Supply XRHV01-PS

» X-ray High Voltage Power Supply XRHV01-PS

High voltage power supply for X-ray source RS 40B1.

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Electron Beam Evaporator Power Supply EBV40A-PS

» Electron Beam Evaporator Power Supply EBV40A-PS

Designed for supplying Electron Beam Evaporator EBV40A used for evaporation of materials under UHV conditions.

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Bakeout Control Unit BCU14

» Bakeout Control Unit BCU14

Perfect unit dedicated for heating zones of the vacuum systems as well as heating samples inside the preparation chambers.

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Wien Filter Power Supply IS40-WPS

» Wien Filter Power Supply IS40-WPS

Power Supply for Wien Mass Filter (Ion Source IS 40E1).

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» Software

Application for Thermal Desorption Spectroscopy

» Application for Thermal Desorption Spectroscopy

Used to control the power, preparing a recipe for heating and acquisition of measured data.

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Synthesium

» Synthesium

New software dedicated to vacuum deposition applications.

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Spectrium

» Spectrium

Control and data acquisition software dedicated to EA15 class analysers.

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