Deposition systems

Deposition system for plasma evaporation [project 383]

RF PACVD System for deposition of carbon layers onto surface of medical implants made of the AISI316L medical steel.

Transferring system:

The chamber is equipped with a large, easy access vacuum door which is dual viton sealed with differential pumping in the seal interspace. This maintains an excellent base pressure whilst providing perfect internal access. 6’’ RF plate allows mounting elements with a different shape.

System configuration:

- Processing chamber:

  • High precision 6’’ table with RF electrode and RF power supply (5kW)
  • Automatic Gas dosing system
  • The deposition process is fully programmable via dedicated PC software and PLC controller.
  • Additional ports dedicated for integrate liquid precursors dosing system

- Accesoriess:

  • Special rack for all electronics units

Related products

» Systems

XPS UPS system [project 511]

» XPS UPS system [project 511]

System dedicated for XPS (ESCA)/UPS experiments in UHV conditions with controllable sample temperature.

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UHV Multichamber XPS - IR system [project 256]

» UHV Multichamber XPS - IR system [project 256]

Multitechnique IR-UHV system offering a wide range of surface characterisation techniques.

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Multichamber XPS/UPS system for catalyst research [project 010]

» Multichamber XPS/UPS system for catalyst research [project 010]

A custom multi-chamber UHV system for the investigation of physical and chemical properties of novel catalyst materials.

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XPS/ESCA analytical UHV system [project 111]

» XPS/ESCA analytical UHV system [project 111]

A analytical UHV system HV system dedicated for investigation of the chemical and physical properties of solid state surfaces in wide temperatures and UHV conditions.

read more
See more  ›

» Components

Flood Source FS 40A1

» Flood Source FS 40A1

Low cost electron flood source for charge neutralisation of insulators or semiconductors in XPS/AES and SIMS applications.

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XYZ Mini Manipulators

» XYZ Mini Manipulators

High precision UHV specimen translator having X, Y and Z motions.

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Infrared Chamber

» Infrared Chamber

Designed for IR spectroscopic investigations.

 

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PTS FARA EXTRA CAPABILITY sample holder

» PTS FARA EXTRA CAPABILITY sample holder

The PTS Faraday Cup with extra capability Sample Holder has replaceable aperture plates.

read more
See more  ›

» Electronics

Thickness Monitors TM13 & TM14

» Thickness Monitors TM13 & TM14

The TM13 and TM14 devices comprise: quartz oscillator, frequency measuring system and communication interface.

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Thickness Monitors Controller TMC-13

» Thickness Monitors Controller TMC-13

Newest technology electronics designed for monitoring and controlling any coating and deposition processes.

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X-ray Source Emission Controller XR40B-EC

» X-ray Source Emission Controller XR40B-EC

The XR40B-EC electronic unit controls the X-ray source emission current.

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X-ray Cooling Box XRCB-02

» X-ray Cooling Box XRCB-02

The XRCB-02 Cooling Box is mainly used to cooling control of the X-ray sources.

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See more  ›

» Software

Spectrium

» Spectrium

Control and data acquisition software dedicated to EA15 class analysers.

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Synthesium

» Synthesium

New software dedicated to vacuum deposition applications.

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Application for Thermal Desorption Spectroscopy

» Application for Thermal Desorption Spectroscopy

Used to control the power, preparing a recipe for heating and acquisition of measured data.

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See more  ›

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