Deposition systems

PLD system [project 465]


Versatile Pulse Layer Deposition system for material screening of oxides and nitrides for photo(electro)catalysis.



The Prevac PLD System is a customized ultra high vacuum system designed for thin film deposition. The main component of the system is a UHV Chamber for PLD (Pulse Laser Deposition) in which material is evaporated by a high energy laser pulse incident upon the surface of ceramic (or metal) targets.

The PLD system is completed with free-standing electrical cabinets containing all the electronics for all system components, pumps and vacuum gauges.

The PLD system consists of turbo-molecular pumping systems with automatic control. The turbo-molecular pumping systems comprise turbo-molecular pump, fore vacuum pump (scroll pump), set of interconnecting bellows, set of valves (safety and vent), set of cables and corresponding microprocessor controlled electronics unit for automatic control of pumping and venting cycles.

The system is equipped with vacuum measuring instruments comprising full range vacuum gauges and capacitive gauge (installed on vacuum chambers), fore vacuum gauges (installed on fore vacuum lines), set of cables and corresponding electronics unit.

Illumination inside of the vacuum chambers is achieved via LED devices installed on the bolt heads of the chamber view ports.

Various different types of PTS sample holders are used for mounting and transferring samples inside the system. These can variously be heated and/or cooled.


Related products

» Systems

Deposition system with door access [project 124]

» Deposition system with door access [project 124]

Deposition system which offers the fexibility of several techniques in a single chamber.

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HIPIMS system [project 335]

» HIPIMS system [project 335]

The HIPIMS Reactor is a dual purpose deposition chamber. It allows accurate and reproducible thin film layer deposition and extensive plasma diagnostic investigation.

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Deposition cluster tool [project 228]

» Deposition cluster tool [project 228]

MBE multi-chamber system for metallic multi-layers from magnetic materials. Features in-situ characterisation of sample magnetic properties, topography and crystallography.

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Custom UHV system for OLED research [project 014]

» Custom UHV system for OLED research [project 014]

A custom multichamber UHV system for the preparation and investigation of organic films (OLEDs).

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See more  ›

» Components

PTS POWDER sample holder

» PTS POWDER sample holder

The PTS POWDER SAMPLE HOLDER is designed for powder samples that do not require heating or cooling.

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X-ray Source RS 40B1

» X-ray Source RS 40B1

High intensity twin anode Al/Mg source optimized for XPS and high pressure XPS experiments.

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Radial Distribution Chamber (UFO)

» Radial Distribution Chamber (UFO)

Designed to transfer samples between multiple analysis, deposition or preparation chambers that are connected to it.

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PTS 1000 RES/C WITH EXTRA CONTACT sample holder

» PTS 1000 RES/C WITH EXTRA CONTACT sample holder

PTS 1000 RES/C-K sample holder with extra contacts is specifically for use in the MBE Chamber.

read more
See more  ›

» Electronics

Motion Control 6

» Motion Control 6

Electronic device for controlling up to 6 stepper motors.

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Research Unit Digital Instrument RUDI-EA2

» Research Unit Digital Instrument RUDI-EA2

Novel, modular high voltage power supply for photoemission and other demanding research applications.

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Electron Source Power Supply ES40-PS

» Electron Source Power Supply ES40-PS

Allows fine adjustment of electron beam energy, density, position on the sample and also beam profile

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Magnetron Power Supply M600DC-PS

» Magnetron Power Supply M600DC-PS

Compact switch-mode power supply designed to drive magnetron sources.

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See more  ›

» Software

Application for Thermal Desorption Spectroscopy

» Application for Thermal Desorption Spectroscopy

Used to control the power, preparing a recipe for heating and acquisition of measured data.

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» Spectrium

Control and data acquisition software dedicated to EA15 class analysers.

read more

» Synthesium

New software dedicated to vacuum deposition applications.

read more
See more  ›


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