Deposition systems

PLD system [project 465]

Description

Versatile Pulse Layer Deposition system for material screening of oxides and nitrides for photo(electro)catalysis.

 

Specification

The Prevac PLD System is a customized ultra high vacuum system designed for thin film deposition. The main component of the system is a UHV Chamber for PLD (Pulse Laser Deposition) in which material is evaporated by a high energy laser pulse incident upon the surface of ceramic (or metal) targets.

The PLD system is completed with free-standing electrical cabinets containing all the electronics for all system components, pumps and vacuum gauges.

The PLD system consists of turbo-molecular pumping systems with automatic control. The turbo-molecular pumping systems comprise turbo-molecular pump, fore vacuum pump (scroll pump), set of interconnecting bellows, set of valves (safety and vent), set of cables and corresponding microprocessor controlled electronics unit for automatic control of pumping and venting cycles.

The system is equipped with vacuum measuring instruments comprising full range vacuum gauges and capacitive gauge (installed on vacuum chambers), fore vacuum gauges (installed on fore vacuum lines), set of cables and corresponding electronics unit.

Illumination inside of the vacuum chambers is achieved via LED devices installed on the bolt heads of the chamber view ports.

Various different types of PTS sample holders are used for mounting and transferring samples inside the system. These can variously be heated and/or cooled.

 

Related products

» Systems

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» Components

Load Lock Chamber

» Load Lock Chamber

Provides a fast and clean method of introducing samples into UHV systems.

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Linear Shifts

» Linear Shifts

UHV transfer mechanism fabricated from a pair of flanges, connected by an edge welded bellows.

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Transport Box (vacuum suitcase)

» Transport Box (vacuum suitcase)

Used for transporting samples between different UHV systems in ultra high vacuum conditions.

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Analytical Chamber

» Analytical Chamber

Designed for applications requiring the investigation of the chemical and physical properties of solid state surfaces, thin films and nanomaterials.

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» Electronics

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Magnetron Power Supply M600DC-PS

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Compact switch-mode power supply designed to drive magnetron sources.

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Ion Source Power Supply IS40-PS

» Ion Source Power Supply IS40-PS

High stability & low noise power supply, which can be configured to work with IS40C1 or IS40E1 Ion Sources.

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Thickness Monitors Controller TMC-13

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Newest technology electronics designed for monitoring and controlling any coating and deposition processes.

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» Software

Application for Thermal Desorption Spectroscopy

» Application for Thermal Desorption Spectroscopy

Used to control the power, preparing a recipe for heating and acquisition of measured data.

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Spectrium

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Control and data acquisition software dedicated to EA15 class analysers.

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Synthesium

» Synthesium

New software dedicated to vacuum deposition applications.

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