Deposition systems

PLD system [project 465]

Description

Versatile Pulse Layer Deposition system for material screening of oxides and nitrides for photo(electro)catalysis.

 

Specification

The Prevac PLD System is a customized ultra high vacuum system designed for thin film deposition. The main component of the system is a UHV Chamber for PLD (Pulse Laser Deposition) in which material is evaporated by a high energy laser pulse incident upon the surface of ceramic (or metal) targets.

The PLD system is completed with free-standing electrical cabinets containing all the electronics for all system components, pumps and vacuum gauges.

The PLD system consists of turbo-molecular pumping systems with automatic control. The turbo-molecular pumping systems comprise turbo-molecular pump, fore vacuum pump (scroll pump), set of interconnecting bellows, set of valves (safety and vent), set of cables and corresponding microprocessor controlled electronics unit for automatic control of pumping and venting cycles.

The system is equipped with vacuum measuring instruments comprising full range vacuum gauges and capacitive gauge (installed on vacuum chambers), fore vacuum gauges (installed on fore vacuum lines), set of cables and corresponding electronics unit.

Illumination inside of the vacuum chambers is achieved via LED devices installed on the bolt heads of the chamber view ports.

Various different types of PTS sample holders are used for mounting and transferring samples inside the system. These can variously be heated and/or cooled.

 

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» Components

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» Electronics

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» Software

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New software dedicated to vacuum deposition applications.

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