Deposition systems

Deposition system with fully automated process control [project 458]

Deposition HV system dedicated for techniques: DC magnetron sputtering, RF magnetron sputtering, reactive sputtering and evaporation using electron beam.

System configuration:

  • Sputtering chamber with base pressure range <3*10-7 mbar, made from stainless steel, with door access.
    The chamber is equipped with two 3” magnetron sources (DC, RF) and 6-pocket electron beam evaporator.
  • Electronic cabinets with integrated computer unit (with touchscreen) and dedicated software.
    Software main features:
    - Full control of deposition system
    - Auto, manual and programmable timer for effective shutter control
    - Graphical system state presentation
    - Process creator and controller
    - Fast, real time data preview
    - real time data acquisition (integration with LIMS data acqusittion system)
    - many others

Transferring system: sample holders up to 6"

 

Related products

» Systems

PLD system [project 198]

» PLD system [project 198]

UHV cluster with PLD chamber and mobile preparation chamber.

read more
Deposition system with door access [project 124]

» Deposition system with door access [project 124]

Deposition system which offers the fexibility of several techniques in a single chamber.

read more
ARTOF Analysis System [project 390]

» ARTOF Analysis System [project 390]

Dedicated system for ARTOF experiments with controllable sample temperature from 7 K to 400 K (PID controlled).

read more
UHV system for thin film evaporation [project 382]

» UHV system for thin film evaporation [project 382]

Customized deposition system dedicated for thin films organic materials deposition.

read more
See more  ›

» Components

2 axes deposition manipulator [project 228]

» 2 axes deposition manipulator [project 228]

The 2 Axes Motorised MBE Manipulator is a high precision, high rigidity, UHV specimen manipulator of modular construction, suitable for a range of R1 motorised continuous substrate rotation and Z translation.

read more
PTS 700/-90 HPC RES/C-K RG sample holder

» PTS 700/-90 HPC RES/C-K RG sample holder

The PTS HPC RES/C-K RG sample holder is dedicated for the High Pressure Cell (reactor).

read more
PTS SPM 2000 EB/C-C sample holder

» PTS SPM 2000 EB/C-C sample holder

The PTS SPM 2000 EB/C-C sample holder is for SPM work and is equipped with electron beam sample heating up to 2000°C.

read more
Cleaver Chamber

» Cleaver Chamber

The cleaver chamber provides a UHV environment for cleaving crystal specimens.

read more
See more  ›

» Electronics

Ion Multi Gauge Controller MG15

» Ion Multi Gauge Controller MG15

Able to support 4 active gauges and up to 3 passive gauges, extending the measurement range to 2×10-12 mbar.

read more
Electron Beam Evaporator Power Supply EBV40A-PS

» Electron Beam Evaporator Power Supply EBV40A-PS

Designed for supplying Electron Beam Evaporator EBV40A used for evaporation of materials under UHV conditions.

read more
Stepper Motor Control Device SMCD12

» Stepper Motor Control Device SMCD12

Control the high power stepper motors in applications where either higher speeds and/or higher torques are required.

read more
Power Control Unit PCU16

» Power Control Unit PCU16

Compact, stand-alone microprocessor device for controlling UHV vacuum systems.

 

read more
See more  ›

» Software

PCU Control

» PCU Control

Full software control of a single vacuum/UHV system including pumps, valves and pressure gauge set.

read more
Electron Beam Evaporator Control

» Electron Beam Evaporator Control

Electron Beam Evaporator Controller software extension for data acquisition and convenient control.

read more
Chart 2D

» Chart 2D

Chart 2D module give user access to see graphic representation of data in time. User can select which data he want to see, also has possibility to configure axes.

read more
Multiaxes Manipulator Control Application

» Multiaxes Manipulator Control Application

The Multi-Axis Control application has been designed for simple control of up to 6 motorized manipulator axes.

read more
See more  ›

TOP

Important:
this site uses cookie files.

We use information saved in cookie files, among others, in statistical purposes and in order to fit the service to individual needs of the user. In your browser you can change your cookie files settings.

Using the site without changing cookie files settings means they will be saved in device memory. More information with tips how to change settings can be found in Privacy policy.

Close

Query list

Ask