Deposition systems

Deposition system with fully automated process control [project 458]

Deposition HV system dedicated for techniques: DC magnetron sputtering, RF magnetron sputtering, reactive sputtering and evaporation using electron beam.

System configuration:

  • Sputtering chamber with base pressure range <3*10-7 mbar, made from stainless steel, with door access.
    The chamber is equipped with two 3” magnetron sources (DC, RF) and 6-pocket electron beam evaporator.
  • Electronic cabinets with integrated computer unit (with touchscreen) and dedicated software.
    Software main features:
    - Full control of deposition system
    - Auto, manual and programmable timer for effective shutter control
    - Graphical system state presentation
    - Process creator and controller
    - Fast, real time data preview
    - real time data acquisition (integration with LIMS data acqusittion system)
    - many others

Transferring system: sample holders up to 6"

 

Related products

» Systems

Scanning XPS system [project 279]

» Scanning XPS system [project 279]

The UHV ESCA system dedicated for investigation of the chemical and physical properties of solid state surfaces in wide temperature and pressure ranges.

read more
High resolution UPS and XPS system [project 317]

» High resolution UPS and XPS system [project 317]

The UHV ESCA system dedicated for investigation of the chemical and physical properties of solid state surfaces in wide temperature and pressure ranges by different methods under very well controlled conditions.

read more
See more  ›

» Components

4-6 axes Helium Manipulators (Open Cycle)

» 4-6 axes Helium Manipulators (Open Cycle)

Spectroscopy UHV manipulators with heating and LHe cooling (open cycle) possibility.

read more
4-6 axes Helium Manipulators (Closed Cycle)

» 4-6 axes Helium Manipulators (Closed Cycle)

Spectroscopy UHV manipulators with heating and LHe cooling (closed cycle) possibility.

read more
Storage Chamber

» Storage Chamber

The storage chambers allow storage of up to 10 sample holders under UHV conditions.

read more
Reorientation Chamber

» Reorientation Chamber

Receive, reorient and transfer a sample holder from one transfer mechanism to another.

read more
See more  ›

» Electronics

Ion Source Power Supply IS40-PS

» Ion Source Power Supply IS40-PS

High stability & low noise power supply, which can be configured to work with IS40C1 or IS40E1 Ion Sources.

read more
Thickness Monitors Controller TMC-13

» Thickness Monitors Controller TMC-13

Newest technology electronics designed for monitoring and controlling any coating and deposition processes.

read more
X-ray High Voltage Power Supply XRHV01-PS

» X-ray High Voltage Power Supply XRHV01-PS

High voltage power supply for X-ray source RS 40B1.

read more
Magnetron Power Supply M600DC-PS

» Magnetron Power Supply M600DC-PS

Compact switch-mode power supply designed to drive magnetron sources.

read more
See more  ›

» Software

Synthesium

» Synthesium

New software dedicated to vacuum deposition applications.

read more
Spectrium

» Spectrium

Control and data acquisition software dedicated to EA15 class analysers.

read more
Application for Thermal Desorption Spectroscopy

» Application for Thermal Desorption Spectroscopy

Used to control the power, preparing a recipe for heating and acquisition of measured data.

read more
See more  ›

TOP

Important:
this site uses cookie files.

We use information saved in cookie files, among others, in statistical purposes and in order to fit the service to individual needs of the user. In your browser you can change your cookie files settings.

Using the site without changing cookie files settings means they will be saved in device memory. More information with tips how to change settings can be found in Privacy policy.

Close

Query list

Ask