Deposition systems

Deposition system with fully automated process control [project 458]

Deposition HV system dedicated for techniques: DC magnetron sputtering, RF magnetron sputtering, reactive sputtering and evaporation using electron beam.

System configuration:

  • Sputtering chamber with base pressure range <3*10-7 mbar, made from stainless steel, with door access.
    The chamber is equipped with two 3” magnetron sources (DC, RF) and 6-pocket electron beam evaporator.
  • Electronic cabinets with integrated computer unit (with touchscreen) and dedicated software.
    Software main features:
    - Full control of deposition system
    - Auto, manual and programmable timer for effective shutter control
    - Graphical system state presentation
    - Process creator and controller
    - Fast, real time data preview
    - real time data acquisition (integration with LIMS data acqusittion system)
    - many others

Transferring system: sample holders up to 6"

 

Related products

» Systems

ARTOF Analysis System [project 390]

» ARTOF Analysis System [project 390]

Dedicated system for ARTOF experiments with controllable sample temperature from 7 K to 400 K (PID controlled).

read more
HIPIMS system [project 335]

» HIPIMS system [project 335]

The HIPIMS Reactor is a dual purpose deposition chamber. It allows accurate and reproducible thin film layer deposition and extensive plasma diagnostic investigation.

read more
Multitechnique UHV system for multilayer epitaxial films [project 022]

» Multitechnique UHV system for multilayer epitaxial films [project 022]

Custom multi-chamber UHV system for the analysis of atomic and electronic surface structure, in­vestigation and preparation of complex epitaxial me­tallic or molecular films on surfaces and chemical analysis of interfaces in multilayer film samples.

read more
Multichamber ESCA UHV system [project 053]

» Multichamber ESCA UHV system [project 053]

Customized multi chamber UHV system dedicated for investigation of the chemical and physical properties of solid state surfaces in wide temperature and pressure ranges.

read more
See more  ›

» Components

PTS 2000 EB/C-C sample holder

» PTS 2000 EB/C-C sample holder

The PTS 2000 EB/C-C sample holder features electron beam sample heating up to 2000°C and is designed specifically for high temperature experiments.

read more
Hemispherical Energy Analyser EA15-HP5

» Hemispherical Energy Analyser EA15-HP5

The EA15-HP5 allows high-resolution PES measurements in static and dynamic environments up to 5 mbar.

read more
Flag style sample holders

» Flag style sample holders

Commonly used sample holder for a wide range of applications.

read more
Mirror/Gratings System Manipulators

» Mirror/Gratings System Manipulators

Multi-axis manipulator in order to determine the correct direction of the beam.

read more
See more  ›

» Electronics

Titanium Sublimation Pump Power Supply TSP03-PS

» Titanium Sublimation Pump Power Supply TSP03-PS

For constant filament current operation and features a thyristor and phase-control circuit for long-term and trouble-free TSP operation.

read more
X-ray Source Electronics Set XREC20

» X-ray Source Electronics Set XREC20

XREC20 electronics set dedicated for controlling SAX X-ray sources.

read more
X-ray Cooling Controller XRCB-02

» X-ray Cooling Controller XRCB-02

The XRCB-02 Cooling Controller is mainly used to cooling control of the X-ray sources.

read more
Ion Multi Gauge Controller MG15

» Ion Multi Gauge Controller MG15

Able to support 4 active gauges and up to 3 passive gauges, extending the measurement range to 2×10-12 mbar.

read more
See more  ›

» Software

Synthesium

» Synthesium

New software dedicated to vacuum deposition applications.

read more
Application for Thermal Desorption Spectroscopy

» Application for Thermal Desorption Spectroscopy

Used to control the power, preparing a recipe for heating and acquisition of measured data.

read more
Spectrium

» Spectrium

Control and data acquisition software dedicated to EA15 class analysers.

read more
See more  ›

TOP
Newsletter

Important:
this site uses cookie files.

We use information saved in cookie files, among others, in statistical purposes and in order to fit the service to individual needs of the user. In your browser you can change your cookie files settings.

Using the site without changing cookie files settings means they will be saved in device memory. More information with tips how to change settings can be found in Privacy policy.

Close

Query list

Ask