Deposition systems

UHV Deposition System [project 464]

This UHV multichamber system is designed for handling 1” diameter substrates consisting of growth chamber, preparation chamber, load lock and distribution chamber. The whole depositions process is controlled by software contained on PC.

  • The Deposition chamber is equipped with numerous ports for diagnostics and ancillary equipment. The different ports in CF standard located on the bottom of the chamber
  • Two levels preparation chamber, equipped with LEED, TDS, ion source, electron beam evaporator, mechanical surface cleaner, and many ports which can be used for future preparation or evaporation devices. The temperature on the sample depends on the sample holders and can vary from -180°C to 2000°C.
  • Distribution Chamber for transferring sample holders to particular chambers connected on its circumference.
  • Load lock chamber prepared for dust samples pumping, with internal bakeout system.

Related products

» Systems

Deposition system with door access [project 236]

» Deposition system with door access [project 236]

Deposition system offer the flexibility of several techniques in a single chamber.

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Multi-technique UHV surface analysis system [project 338]

» Multi-technique UHV surface analysis system [project 338]

Multitechnique UHV system offering a wide range of surface characterisation techniques including XPS, UPS, ARPES, LEED.

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UHV multichamber system [project 422]

» UHV multichamber system [project 422]

Multitechnique UHV system for FTIR investigations, equipped with MBE chamber and preparation module.

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Ultra High Resolution Photoemission Spectrometer [project 351]

» Ultra High Resolution Photoemission Spectrometer [project 351]

A analytical UHV system dedicated for investigation of the chemical and physical properties of solid state surfaces in low temperatures and UHV conditions.

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» Components

Mirror/Gratings System Manipulators

» Mirror/Gratings System Manipulators

Multi-axis manipulator in order to determine the correct direction of the beam.

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Flood Source FS 40A1

» Flood Source FS 40A1

Low cost electron flood source for charge neutralisation of insulators or semiconductors in XPS/AES and SIMS applications.

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PTS 2000 EB/C-C sample holder

» PTS 2000 EB/C-C sample holder

The PTS 2000 EB/C-C sample holder features electron beam sample heating up to 2000°C and is designed specifically for high temperature experiments.

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Z Chain Slides

» Z Chain Slides

Provides short strokes of Z travel with a wide range of bellows I.D.

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» Electronics

Stepper Motor Control Device SMCD10

» Stepper Motor Control Device SMCD10

Control the low power stepper motors in applications where high speed and high torque is not very important.

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Thickness Monitors Controller TMC-13

» Thickness Monitors Controller TMC-13

Newest technology electronics designed for monitoring and controlling any coating and deposition processes.

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Sample Heating Power Supply HEAT3-PS

» Sample Heating Power Supply HEAT3-PS

Power supply operated by touchscreen with dual mode heating (resistive and electron bombardment) and high efficiency.

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X-ray Source Electronics Set XR40B

» X-ray Source Electronics Set XR40B

XR40B electronics set is used to control the X-ray source RS 40B1.

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» Software

Synthesium

» Synthesium

New software dedicated to vacuum deposition applications.

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Spectrium

» Spectrium

Control and data acquisition software dedicated to EA15 class analysers.

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Application for Thermal Desorption Spectroscopy

» Application for Thermal Desorption Spectroscopy

Used to control the power, preparing a recipe for heating and acquisition of measured data.

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