Deposition systems

MBE system [project 531]

Stand-alone MBE sytem with fast intro chamber.

  • Base pressure better than 2x10-10 mbar


  • 4-axes manipulator with direct and e-beam heating up to 1200 °C and LN2 cooling


  • Load lock with linear transfer for fast and easy flag style sample holders introduction

. Able to storage up to 6 holders.
  • Process chamber contains ports for e.g. RHEED gun, ion gun, beam flux monitor, quartz balances etc.

The process chamber is equipped with additional ports for e.g. analysis instruments.

 

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