Deposition systems

MBE system [project 531]

MBE system [project 531]

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Stand-alone MBE sytem with fast intro chamber.

Base pressure better than 2x10^-10 mbar  
4-axes manipulator with direct and e-beam heating up to 1200 °C and LN₂ cooling  
Load lock with linear transfer for fast and easy flag style sample holders introduction  . Able to storage up to 6 holders.
Process chamber contains ports for e.g. RHEED gun, ion gun, beam flux monitor, quartz balances etc.

The process chamber is equipped with additional ports for e.g. analysis instruments.

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Power supply operated by touchscreen with dual mode heating (resistive and electron bombardment) and high efficiency.

» Software

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