Deposition systems

Sputter deposition system [project 500]

Magnetron sputtering system dedicated to film layer deposition.

Transferring system:

PTS sample holder for up to 6" wafers (with different shapes).

System configuration:

- Processing chamber with base pressure range <5*10-8 mbar:

  • High precision, motorised 2-axes manipulator with continuous azimuthal rotation and heating up to 800°C (depends on the sample holder type)
  • 8 x 2" magnetrons sources
  • 2 x thermal evaporation boats
  • Deposition rate measurement system: Quartz Balance and Thickness monitor
  • Automatic Gas dosing system
  • The deposition process is fully programmable via dedicated PC software and PLC controller.
  • Special lifting trolley for mounting and dismounting bottom flange with the sources.

- Linear transfer

- Accessories:

  • Special rack for all electronics units
  • Chiller
  • Special design frame adjust for trolley using for easy disassembling bottom flange with sources

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EMIL Analytics Project. Multifunctional, multichamber ultra high vacuum analytical system.

 

 

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