Deposition systems

Magnetron Sputtering System
[project 533]

System for research and development for thin film coating of substrate with different materials.

Deposition system prepared for planar and confocal „sputter down” arrangement and compatible with photolithographic lift-off process technology.

 

  • Fully automated transferring and deposition process
  • Process chamber with five DN 160CF ports for magnetrons, equipped with shields against cross contamination and vacuum door for quick and easy access to all components mounted in the chamber
  • Base pressure: <5 x 10-7 mbar
  • Substrate holder manipulator with 2 stations (for planar and confocal sputtering geometry). Stations are ready to carry up to 100 mm diameter wafers or 50x50 mm cylindrical substrates. Both stations have thermal stabilisation.
  • Load lock/storage for up to 6 holders with easy access door

 

Control software Synthesium for full control over process recipes and monitoring, manipulating all relevant subsystems.

The deposition chamber is equipped with additional CF ports for e.g. analysis instruments.

Related products

» Systems

Deposition system with door access [project 365]

» Deposition system with door access [project 365]

 

UHV sputtering system dedicated to accurate and reproducible thin film layer deposition. It is configured to allow sputtering from two special design electron source.

 

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UHV multichamber cluster tool [project 526]

» UHV multichamber cluster tool [project 526]

Multichamber deposition setup with tunnel transferring system.

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Sputtering system [project 241]

» Sputtering system [project 241]

UHV magnetron sputtering system dedicated to accurate and reproducible thin film layer deposition. It is configured to allow sputtering from both magnetic and non-magnetic target materials alike.

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» Components

Effusion Cell EF 40C1

» Effusion Cell EF 40C1

EF 40C1 Effusion Cell (Knudsen Cell) is a source designed for indirect resistive heating and delivering highly constant evaporation rates.

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Wobble Sticks with Rotating Tip

» Wobble Sticks with Rotating Tip

Mainly used to operate in vacuum mechanisms such as shutters, adjustment probes and variable orifices.

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Electron Source ES 40C1

» Electron Source ES 40C1

Scanable electron gun with small spot profile.

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Flood Source FS 40A1

» Flood Source FS 40A1

Low cost electron flood source for charge neutralisation of insulators or semiconductors in XPS/AES and SIMS applications.

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» Electronics

Flood Source Power Supply FS40-PS

» Flood Source Power Supply FS40-PS

New power supply with touchscreen dedicated for Flood Source FS40A1.

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Research Unit Digital Instrument RUDI-8M

» Research Unit Digital Instrument RUDI-8M

Modular, compact high voltage power supply for e.g. photoemission applications.

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Ion Source Power Supply IS40-PS

» Ion Source Power Supply IS40-PS

High stability & low noise power supply, which can be configured to work with IS40C1 or IS40E1 Ion Sources.

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X-ray Source Emission Controller XR40B-EC

» X-ray Source Emission Controller XR40B-EC

The XR40B-EC electronic unit controls the X-ray source emission current.

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» Software

Spectrium

» Spectrium

Control and data acquisition software dedicated to EA15 class analysers.

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Application for Thermal Desorption Spectroscopy

» Application for Thermal Desorption Spectroscopy

Used to control the power, preparing a recipe for heating and acquisition of measured data.

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Synthesium

» Synthesium

New software dedicated to vacuum deposition applications.

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See more  ›

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