Deposition systems

Ion Milling System
[project 557]

UHV system for sample surface ion etching with high homogeneity.

■ Full motorised 2-axes manipulator with fast operation automatic shutter and with integrated Faraday cup
■ Manipulator with an efficient water cooling system to guarantee required temperature stabilization during the process
■ Wide range of plate style sample holder types up to 6” size
■ Ready for gridless / gridded, RF / DC ion sources
■ Dedicated software and HMI device for controlling and monitoring the process and all components
■ Internal protective liner/shield
■ Bottom flange for e.g. electron beam evaporators
■ Design is easy to extend with transferring system
■ Front opening door for easy access to the process chamber

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