Deposition systems

Deposition cluster tool [project 228]

Description

MBE multi-chamber system for metallic multi-layers from magnetic materials. Features in-situ characterisation of sample magnetic properties, topography and crystallography.

  • 10-11 mbar vacuum level
  • Semi-automatic transfer of 3" sample holders and smaller samples
  • 1400°C Heating of 3" sample holders in MBE chamber
  • 1700°C EB heating of smaller holders in the preparation chamber
  • MBE E-guns with closed loop control by RGA
  • Full software control of the MBE process
  • Ion assist prep chamber with 25 kV ion source with differential pumping
  • Low vibration design of the system, especially for SPM and MOKE
  • Independent intro for tips and samples for SPM
  • UHV Kerr effect analysis chamber
  • All process chambers with thermocouple and pyrometer temperature control
  • LCD visualisation of complete system status

The system consists of:

  • MBE chamber. Equipped with E-guns for 12 materials and 8 effusion cells. With in situ RHEED system. Deposition processes are fully software programmed and controlled via PLC controller. The chamber is equipped with powerful pumping system including cryo-panels. Samples can be heated up to 1400°C
  • Radial distribution chamber. Semi-automatic transfer/distribution for reliable movement of up to 3" sample holders between preparation and characterisation chambers.
  • Preparation chamber with LEED optics and both direct and e-beam heating (up to 1700°C for small samples)
  • Preparation chamber with high energy ion source for sample etching, preparation and structure modification
  • MOKE characterisation chamber, for in-situ Kerr effect measurements
  • Integrated SPM chamber with additional tip and sample loading system
  • Additional chambers for sample introduction and storage

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