Deposition systems

UHV system [project 063]


Ultra high vacuum system for investigation of surface conditions of samples under controlled conditions. The system is equipped with the ports in CF standard for attaching measurement and auxiliary vacuum instruments.
The main parts of the system are Kelvin Probe and precise linear manipulator with integrated heater and cryostat for heating up to 1000°C and cooling down to temperature of LN2. The UHV chamber is additionally equipped with ports for attaching residual gas analyzer, gas lines for dosing and controlling atmosphere around the sample, some ports for vacuum equipment for example for turbomolecular pump and vacuum gauges and other ports for electrical connection. Exchanging the sample is very simple by using special vacuum doors after venting the chamber.

The system was designed in such a way that it is possible to attach a load lock with linear transfer for introducing the samples from atmospheric to UHV conditions.


  • Temperature controller with PC control
  • RGA with software for thermal desorption spectroscopy
  • RGA with pressure reduction system for measurements in the range 1000mbar to 10-2 mbar
  • Load lock with linear transfer and dedicated vacuum system
  • PCU for managing the vacuum pump group
  • Vacuum gauges with controllers

Related products

» Systems

Sputtering system [project 241]

» Sputtering system [project 241]

UHV magnetron sputtering system dedicated to accurate and reproducible thin film layer deposition. It is configured to allow sputtering from both magnetic and non-magnetic target materials alike.

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Deposition cluster tool [project 228]

» Deposition cluster tool [project 228]

MBE multi-chamber system for metallic multi-layers from magnetic materials. Features in-situ characterisation of sample magnetic properties, topography and crystallography.

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Multifunctional UHV system [project 093]

» Multifunctional UHV system [project 093]

Multifunctional UHV system for range of studies.

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XPS/ESCA analytical UHV system [project 111]

» XPS/ESCA analytical UHV system [project 111]

A analytical UHV system HV system dedicated for investigation of the chemical and physical properties of solid state surfaces in wide temperatures and UHV conditions.

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See more  ›

» Components

PTS QUARTZ sample holder

» PTS QUARTZ sample holder

The PTS QUARTZ sample holder is equipped with integrated quartz balance for deposition rate measurements.

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Deposition holders

» Deposition holders

Sample holders (substrate holders, plates, wafers, molyblocs) dedicated for different deposition techniques, such as MBE, magnetron sputtering, thermal evaporation and others.

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» Goniometer

The precision, two axes goniometer stage is designed specifically for anti-clash and sample access.

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PTS 1400 OMC EB/C-K sample holder

» PTS 1400 OMC EB/C-K sample holder

The PTS 1400 OMC EB/C-K sample holder adapts to flag style sample holders for systems that are equipped with STM.

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» Electronics

X-Ray Source Electronics XR40B

» X-Ray Source Electronics XR40B

XR40B-EC Emission controller is used to control the emission current of the X-ray source RS 40B1.

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Titanium Sublimation Pump Power Supply TSP03-PS

» Titanium Sublimation Pump Power Supply TSP03-PS

The TSP03-PS is configured for constant filament current operation and features a thyristor and phase-control circuit for long-term and trouble-free TSP operation.

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Research Unit Digital Instrument RUDI-EA2

» Research Unit Digital Instrument RUDI-EA2

RUDI-EA2 is a novel, modular high voltage power supply for photoemission and other demanding research applications.

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» Software


» Synthesium

New software dedicated to vacuum deposition applications.

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Thermal Desorption Spectrometer

» Thermal Desorption Spectrometer

TDS Control Application allows precise control of Thermal Desorption Spectroscopy processes with fully integrated management of a temperature controller and mass spectrometer combination.

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Quartz Balance Control Application

» Quartz Balance Control Application

Measurement of frequency, rate and thickness from both channels simultaneously.

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Multiaxes Manipulator Control Application

» Multiaxes Manipulator Control Application

The Multi-Axis Control application has been designed for simple control of up to 6 motorized manipulator axes.

read more
See more  ›


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