Others

Tribometer system [project 504]

Tribometer chamber is equipped with:
2 axes manipulator (with heating) for ball sample holders (up to 1/2")
1 axis manipulator (with heating and cooling) for flat sample holders
▪ pressure range from 10-9 mbar up to 1 bar
▪ prepared to work with e.g. oxygen, hydrogen, water vapor, simple hydrocarbons and others

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» Systems

XPS UPS system [project 511]

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System dedicated for XPS (ESCA)/UPS experiments in UHV conditions with controllable sample temperature.

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Deposition system with door access [project 244]

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Deposition system which offers the flexibility of several techniques in a single chamber.

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Sputtering system [project 241]

» Sputtering system [project 241]

UHV magnetron sputtering system dedicated to accurate and reproducible thin film layer deposition. It is configured to allow sputtering from both magnetic and non-magnetic target materials alike.

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» Components

Flag style sample holders

» Flag style sample holders

Commonly used sample holder for a wide range of applications.

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1-4 axes Sputtering Manipulators

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Designed for sputter deposition applications (including reactive sputtering).

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PTS SPM DIR/C-K sample holder

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The PTS SPM DIR/C-K Sample Holder is for SPM work and is equipped with direct sample heating and cooling over the range -170°C to 1200°C.

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Reorientation Chamber

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Receive, reorient and transfer a sample holder from one transfer mechanism to another.

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» Electronics

Electron Source Power Supply ES40-PS

» Electron Source Power Supply ES40-PS

Allows fine adjustment of electron beam energy, density, position on the sample and also beam profile

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Thickness Monitors Controller TMC-13

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Newest technology electronics designed for monitoring and controlling any coating and deposition processes.

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Bakeout Control Unit BCU14

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Perfect unit dedicated for heating zones of the vacuum systems as well as heating samples inside the preparation chambers.

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» Software

Spectrium

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Control and data acquisition software dedicated to EA15 class analysers.

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New software dedicated to vacuum deposition applications.

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