Ion Source IS 40E1

Ion Source IS 40E11/2

Technical data

Mounting flange DN 40CF (rotatable)
Gases Ar and reactive gases (O2, H2 hydrocarbons with reduced lifetime)
Energy range 0.15 keV - 5 keV
Scan area 10 mm x 10 mm (for working distance of 23 mm)
Current density up to 4 mA / cm2 (for distance 23 mm)
Beam current > 1 μA (for distance 23 mm)
Cathode type yttrium oxide coated iridium filament
Small cone angle 50°
Insertion length 163 mm (standard)
FWHM dependent on working distance
(e.g. < 150 μm for distance 23 mm)
Typical working distance 23 - 120 mm
Bakeout temperature 250 °C
Working pressure 10-8 mbar (with max beam current)

The IS 40E1 ion source is a two lens, extractor type, focused, differentially pumped ion gun.

The source is able to raster a 10 mm x 10 mm area of the surface at the recommended working distance. It is particularly suitable for depth profiling in XPS, ISS and SIMS. The source can be also used for sample surface cleaning.


  • Specially configured nose cone
  • Operation with inert (Ar) & reactive gases (O2, H2, hydrocarbons with reduced lifetime)
  • Continuously variable spot size
  • Extremely homogeneous crater/beam profile
  • Onside replaceable filament
  • UHV gas inlet
  • UHV conditions maintained in chamber
  • Integrated scan and deflection unit
  • Correction of incident electron beam angle (provided by IS40-PS power supply)


  • Wien mass filter
  • Gas dosing system
  • Linear shift: 25, 50, 75, 100 mm
  • Differential pumping (2 stages)

Download brochure

Related products

» Electronics

Ion Source Power Supply IS40-PS

» Ion Source Power Supply IS40-PS

High stability & low noise power supply, which can be configured to work with IS40C1 or IS40E1 Ion Sources.

read more
See more  ›


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