Instruments

Quartz Balance QO 40A1

Quartz Balance QO 40A1

Technical data

Mounting flange DN 40CF (rotatable)
Max. operation temperature up to 300°C (with water cooling)
Water cooling (required) water flow > 0.5 l/min
temperature: 20 - 30 °C
max pressure: 6 bar
Crystal frequency  4.8 - 6 MHz, 14 mm diameter (industry standard)
Insertion length dependent on specification and geometry of the chamber
Bakeout temperature up to 150 °C

The Quartz Balance QO 40A1 instrument provides a real-time, progressive indication of coating thickness during deposition, allowing the production of coatings of high accuracy and reproducibility.

The thickness of both evaporated and sputter coated films can be monitored. The sensor head is a water cooled, non-magnetic housing which is permanently positioned in the vacuum system. The crystal face is parallel to the water cooling feedthrough pipes. The Quartz Balance QO 40A1 is mounted on a DN 40CF flange with two Ø6 pipes and Microdot S-50 coaxial connector. Customized insertion length 130 - 500 mm (other on request).

Features

  • Water-colled sensor head
  • Easy exchangeable quartz

Options

  • Customised insertion length
  • With or without integrated manual/electro-pneumatic shutterDifferent mounting flanges (e.g. DN 40 KF)
  • Other quartz balance geometries on request (e.g. perpendicular head geometry)
  • Linear shift

 

Watch video tutorial

Quartz Balance QO40AA1: Replacement of quartz crystal

 

Download brochure

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