Beam Flux Monitor

Beam Flux Monitor1/2

Technical data

Mounting flange DN 63CF (non-rotatable) 
Measurement system Bayard-Alpert ion gauge
Measurement range 10-3 to 2x10-11 Torr
Linear stroke 150 mm (other on request)
Max. outer diameter 63 mm
Filament dual filament, ytrium coated iridium
Controller 3 channel MG15 - communication interface: RS232/485, Ethernet, PROFINET (option - specify at order)
Bakeout temperature up to 200 °C

The Beam Flux Monitor enables measurement of the beam equivalent pressure (BEP) in MBE applications via a Bayard Alpert ionization gauge.

It is typically mounted on a linear shift/z-stage to allow the filament to be positioned near to the substrate and includes a protection shield when in the standby position.

Readouts and full control (device status, Z-axis shift) are provided by dedicated software application and Ion Multi Gauge Controller. Application can be integrated with Synthesium - advanced deposition software tool.


  • BEP measurement
  • Ion current measurement [nA units]


  • Motorisation
  • Customised insertion length

Related products

» Electronics

Ion Multi Gauge Controller MG13

» Ion Multi Gauge Controller MG13

Supports 2 vacuum gauges: one Bayard-Alpert gauge and any others existing gauge on the market based on 0÷10 V output standard.

read more
Ion Multi Gauge Controller MG15

» Ion Multi Gauge Controller MG15

Able to support 4 active gauges and up to 3 passive gauges, extending the measurement range to 2×10-12 mbar.

read more
See more  ›

» Software


» Synthesium

New software dedicated to vacuum deposition applications.

read more
See more  ›


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