Beam Flux Monitor
|Mounting flange||DN 63CF (non-rotatable)|
|Measurement system||Bayard-Alpert ion gauge|
|Measurement range||10-3 to 2x10-11 Torr|
|Linear stroke||150 mm (other on request)|
|Max. outer diameter||63 mm|
|Filament||dual filament, ytrium coated iridium|
|Controller||3 channel MG15 - communication interface: RS232/485, Ethernet, PROFINET (option - specify at order)|
|Bakeout temperature||up to 200 °C|
The Beam Flux Monitor enables measurement of the beam equivalent pressure (BEP) in MBE applications via a Bayard Alpert ionization gauge.
It is typically mounted on a linear shift/z-stage to allow the filament to be positioned near to the substrate and includes a protection shield when in the standby position.
Readouts and full control (device status, Z-axis shift) are provided by dedicated software application and Ion Multi Gauge Controller. Application can be integrated with Synthesium - advanced deposition software tool.
- BEP measurement
- Ion current measurement [nA units]
- Customised insertion length