1 channel for active vacuum gaguges: CTR90, TTR90, TTR91, TTR211, PTR225, PTR90, ITR90, ITR100, Baratron, ANALOG IN, MKS937A, PG105, MG13/14, PKR251/360/361, PCR280, ATMION
Mass Flow Controller
1 channel for MKS KF1
Communication interface
RS232/485, Ethernet
Communication protocol
MODBUS-TCP/RTU
User Interface
5” TFT display with touchscreen, digital encoder
Interface languages
English, German, Polish
Dimensions
242 x 87 x 450 mm (W x H x D), 2U 42HP
Weight (approx.)
6 kg
* easy to extend with additional modules, up to: 2,4 A/3,6 A/4,8 A ** easy to extend with additional modules, up to: 1200 W/1800 W/2400 W
The M600DC-PS is compact switch-mode power supply designed to drive magnetron sources.
All adjustable parameters are displayed on the large TFT display with touchscreen. All settings can be manually adjusted or can be stored and recalled automatically after unit switch on. The unit also features a built in timer and automatic standby mode. It is fully interlocked for both, user and device safety. Unit can be remotely controlled via one of available analog or digital interfaces.
Features
• Easy to extend power up to 1200 W/1800 W/2400 W with additional modules • Switch mode for 3 magnetron sources with shutters control • Adjustable limits of voltage, current and power separately for each output • Multiple I/O - individual programmable • Arc detection system • 2D real time chart module
Support for: • Thickness and evaporation rate measurements • Vacuum measurements • Mass Flow Controller
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