Measurement controllers

Thickness Monitors Controller TMC-13

Thickness Monitors Controller TMC-131/4

Technical data

Supply voltage 100-240 VAC, 50/60 Hz (power consumption max 100 W)
TM sensor inputs channels 6
Thickness 0 - 9999000 Å
Rate 0 - 9999 Å/s
Compatible sensors
(two channels)
CTR90, TTR91, TTR211, PTR225, PTR90, ITR90, ITR100, Baratron, ANALOG IN, MKS937A, PG105, MG13/14, PKR251/360/361, PCR280, ATMION
Frequency resolution TM13: 0.1 Hz | TM14: 0.01 Hz
Frequency range 2-6 MHz
Thickness resolution TM13: 0.1 Å | TM14: 0.01 Å
Rate resolution TM13: 0.1 Å/s | TM14: 0.01 Å/s
Frequency stability TM13: 0.5 ppm | TM14: 0.5 ppm
Tooling factor 1 - 400%
Measurement units Å, kÅ, nm
Measurement period 100 ms - 2 s (depend on TM type)
Shutter control manual, time, thickness
Shutter time 1 - 1000000 s
Pressure channels inputs 2
Measurement units mbar, Pa, Torr, Psia
Degas time 1 - 3 min
Output ▪ 8 relay outputs (2 outputs with COM NC and NO contacts)
▪ 2 analog outputs: 0-10V (retransmision thickness, rate, pressure)
Inputs 4 digital inputs (in 24V logic)
Communication interface RS232/485, Ethernet
Communication protocol MODBUS-TCP
User interface 7″ TFT display with touchscreen
Interface languages English, German, Polish
Dimensions 212.6 x 128.4 x 260.9 mm (W x H x D)
Weight (approx.) 3 kg

TMC13 is the newest technology electronics designed for monitoring and controlling any coating and deposition processes.

Up to six channel inputs and two additional vacuum gauge channels together with 7" TFT display makes this unit really unique and universal. Sensor inputs can be assigned to different materials with individual parameters as well. High speed and high accuracy measuring process controlled by DSP processor improves the film quality and repeatability. It brings also the features of accuracy, stability and instrument configuration. Autosave function for saving your parameters/unit preset and applying them automatically after restart.

Features

  • Up to 6 channels for thickness monitor sensors with quartz balances
  • 2D real time chart module (option)
  • two inputs for most active vacuum gauges
  • up to 8 shutters and I/O reprogrammable
  • relay outputs
  • two reprogrammable analog outputs for rate and thickness monitoring with 16 bits resolution
  • industry standard 6 MHz Crystal
  • frequency resolution: 0.1 Hz (TM13) or 0.01 Hz (TM14)
  • operation of up to two multi-crystal sensor heads (pneumatic or stepper motor)
  • compact design
  • Rapid SE and LabVIEW libraries
  • one-touch material change
  • favourites list for frequently used materials
  • one-touch units change
  • save individual user profile
  • built-in video tutorials

Additional Information

Available software dedicated for precise rate measurements. Registers changes in the frequency of the quartz resonator in time (in the form of a graph). Allows the user to calculate the evaporation rate from the selected time interval. Suitable for e.g. MBE applications.

Download brochure

Watch video tutorial:
Quartz Balance QO40AA1: Replacement of quartz crystal

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