One axis manipulators

Z Chain Slide

Z Chain Slide

Technical data

Bakeout temperature 150°C
Travelling flange DN 100CF or DN 160CF
Standard base flange DN 100CF or DN 160CF
Z motion control Handwheel or stepper motor
Z range 50 - 300 mm
Resolution (manual/motorised)

50 μm / standard 10 μm

(1 μm on request)


 The Z Chain Slide provides short strokes of Z travel with a wide range of bellows I.D. The slide is provided through three lead screws which are synchronously driven by a drive chain. Manual operation is provided by a handwheel assembly operating through a wormdrive reduction system. 


The Z Chain Slides are heavy duty translators designed to move heavy objects accurately in and out of the vacuum system. They are well suited to applications involving equipment insertion and withdrawal from points where space is restricted. 

Additional information

Z Chain Slides are often integrated with an XY stage. The unit is intended primarily for vertical operation with the load supported on the Z axis. For alternative orientations please contact our technical department. The Z Chain Slide can be motorised with the Stepper Motor shift, controlled by the stepper motor driver SMCD10. The motion is fully controlled by PREVAC manipulator control software. 



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