A analytical UHV system dedicated for investigation of the chemical and physical properties of solid state surfaces in UHV conditions integrated with MBE chamber.read more
Deposition HV system dedicated for: DC magnetron sputtering, RF magnetron sputtering, reactive sputtering and evaporation using electron beam.read more
Horizontal and vertical shutters, positioned inside the vacuum chamber, are translated via a single axis manipulator in order to adjust the shape of cross-sectional area of the beam.read more
Vacuum mirror chambers are situated along the synchrotron beam line.read more
High resolution Photoemision Spectrometer integrated with in-situ thin film pulsed laser deposition set up.read more
Combinatorial, high-throughput Pulsed Layer Deposition system for oxides and nitrides.read more
EMIL Analytics Project. Multifunctional, multichamber ultra high vacuum analytical system.