Multi-chamber Cluster Tool

with tunnel transferring system have been installed at NGI Manchester University

Set-up contains deposition chamber for thin film layer growth, STM, two load-lock chambers (including fast entry chamber for sample holder cassette with up to 15 pcs holders capacity) and multi-segment linear transferring tunnel. The second part of delivery - core chamber with equipment, cleaving chamber and third load-lock - is on the way!

PREVAC Deposition Cluster Tool in UNI Manchester lab

PREVAC Deposition Cluster Tool at NGI Manchester University



this site uses cookie files.

We use information saved in cookie files, among others, in statistical purposes and in order to fit the service to individual needs of the user. In your browser you can change your cookie files settings.

Using the site without changing cookie files settings means they will be saved in device memory. More information with tips how to change settings can be found in Privacy policy.


Query list