Multi-chamber Cluster Tool
with tunnel transferring system have been installed at NGI Manchester University
Set-up contains deposition chamber for thin film layer growth, STM, two load-lock chambers (including fast entry chamber for sample holder cassette with up to 15 pcs holders capacity) and multi-segment linear transferring tunnel. The second part of delivery - core chamber with equipment, cleaving chamber and third load-lock - is on the way!
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